Abstract: A method for identifying areas of low overburden which degrade (increase) metal polish nonuniformity is discussed. Also described is a method for modifying these areas to increase their overburden, thus slowing down the metal polish rate and improving overall polish uniformity. The resulting structure forms slots in groups of functional lines, such as bus lines, when the functional lines have a density prior to forming the slots that exceeds a predetermined amount. In one embodiment, an area of the wafer has a maximum width of 1.5 microns in an area that has a feature density greater than approximately 50 percent. The methods and resulting structures create a higher feature density, thereby increasing polishing uniformity.

Abstract: A method for identifying areas of low overburden which degrade (increase) metal polish nonuniformity is discussed. Also described is a method for modifying these areas to increase their overburden, thus slowing down the metal polish rate and improving overall polish uniformity. The resulting structure forms slots in groups of functional lines, such as bus lines, when the functional lines have a density prior to forming the slots that exceeds a predetermined amount. In one embodiment, an area of the wafer has a maximum width of 1.5 microns in an area that has a feature density greater than approximately 50 percent. The methods and resulting structures create a higher feature density, thereby increasing polishing uniformity.

Abstract: In a feature layer of a semiconductor wafer, dummy tiles which overcome the tendency of dishing and erosion to occur during a CMP process are placed with various sizes and in various positions. An isolation zone is provided around active features. A scanning process of the feature layout surveys oxide density and nitride density over the wafer layer outside of said isolation zone. Values of the ratios of oxide/nitride density for two or more length scales which define tiling zones, are calculated. Tile placement and sizing in the zones is dependent upon the oxide/nitride density ratio values; and further upon an oxide deposition model specific to the oxide used in the fabrication process and upon a polishing model of the CMP process being employed.

Abstract: A method for identifying areas of low overburden which degrade (increase) metal polish nonuniformity is discussed. Also described is a method for modifying these areas to increase their overburden, thus slowing down the metal polish rate and improving overall polish uniformity. The resulting structure forms slots in groups of functional lines, such as bus lines, when the functional lines have a density prior to forming the slots that exceeds a predetermined amount. In one embodiment, an area of the wafer has a maximum width of 1.5 microns in an area that has a feature density greater than approximately 50 percent. The methods and resulting structures create a higher feature density, thereby increasing polishing uniformity.

Abstract: A method for forming an integrated circuit device having dummy features and the resulting structure are disclosed. One embodiment comprises a first active feature separated from a substantially smaller second active feature by a dummy-available region void of active features. Within the dummy-available region and in close proximity to the second active feature exists a dummy feature.

Abstract: Selective placement of polishing dummy feature patterns, rather than indiscriminate placement of polishing dummy feature patterns, is used. Both low frequency (hundreds of microns and larger) and high frequency (10 microns and less) of topography changes are examined. The polishing dummy feature patterns can be specifically tailored to a semiconductor device and polishing conditions used in forming the semiconductor device. When designing an integrated circuit, polishing effects for the active features can be predicted. After polishing dummy feature pattern(s) are placed into the layout, the planarity can be examined on a local level (a portion but not all of the device) and a more global level (all of the device, devices corresponding to a reticle field, or even an entire wafer).

Abstract: A method for forming an integrated circuit device having dummy features and the resulting structure are disclosed. One embodiment comprises a first active feature separated from a substantially smaller second active feature by a dummy-available region void of active features. Within the dummy-available region and in close proximity to the second active feature exists a dummy feature.

Abstract: A process for forming a masking database that includes defining a first feature level for the masking database corresponding to a first layer. The first feature level includes a first region with a first feature density and a second region with a second feature density that is substantially different from the first feature density. The process also includes defining a second feature level for the masking database corresponding to a second layer, wherein the second feature level is to be formed over a substrate after the first feature level has been formed over or within the substrate. A first feature within the second feature level will be formed within the first region, a second feature within the second feature level will be formed within the second region. The second layer will have a first thickness over the first layer within the first region and has a second thickness over the first layer within the second region.

Abstract: At least one process-assist feature (210, 70, 706, 806, 506, 406, 608, 904, 1106, 108, 1206, 1208) at or near a via location of a wiring structure (75, 700, 800, 500, 400, 614, 908, 1205) within a semiconductor device is used to improve processing or processing margin during subsequent processing. For at least some of the embodiments of the present invention, the process-assist features feature (210, 70, 706, 806, 506, 406, 608, 904, 1106, 1108, 1206, 1208) help to make a flowable layer more uniform over via locations (84, 74, 704, 804, 504, 404, 603, 904, 1104, 1204). Typically, this can help in the formation of via openings. When a resist layer (204) is formed over the process-assist features, the resist layer (204) will have a more uniform thickness over most via locations within the device. When an insulating layer (197) is formed over the via locations, the insulating layer (107) will have a more uniform thickness over most via locations within the device.

Abstract: Selective placement of polishing dummy feature patterns, rather than indiscriminate placement of polishing dummy feature patterns, is used. Both low frequency (hundreds of microns and larger) and high frequency (10 microns and less) of topography changes are examined. The polishing dummy feature patterns can be specifically tailored to a semiconductor device and polishing conditions used in forming the semiconductor device. When designing an integrated circuit, polishing effects for the active features can be predicted. After polishing dummy feature pattern(s) are placed into the layout, the planarity can be examined on a local level (a portion but not all of the device) and a more global level (all of the device, devices corresponding to a reticle field, or even an entire wafer).

Abstract: Selective placement of polishing dummy feature patterns, rather than indiscriminate placement of polishing dummy feature patterns, is used. Both low frequency (hundreds of microns and larger) and high frequency (10 microns and less) of topography changes are examined. The polishing dummy feature patterns can be specifically tailored to a semiconductor device and polishing conditions used in forming the semiconductor device. When designing an integrated circuit, polishing effects for the active features can be predicted. After polishing dummy feature pattern(s) are placed into the layout, the planarity can be examined on a local level (a portion but not all of the device) and a more global level (all of the device, devices corresponding to a reticle field, or even an entire wafer).