Abstract: The invention encompasses a method of generating information about materials in a composition. A reagent is utilized to dissolve portions of the composition, and thereafter is filtered through a substrate which is then scanned with a microscope using automated displacement of the substrate to obtain data about the non-dissolved portions at locations along a grid pattern. Information about the size and quantity of the non-dissolved portions of the composition is generated. The invention also encompasses a method of generating information about impurities present in a metal composition. Metallic portions of the composition are selectively dissolved relative to impurities to form a solution. The solution is filtered through a substrate which is then scanned with a microscope to obtain data about a darkness of the impurities relative to a background. The data is processed to generate information about the size, quantity and type of the impurities.

Abstract: The invention includes a method for testing materials, such as for example sputtering target materials, other materials for electronics applications, or other materials in general in which homogeneity throughout the material is desired. A plurality of positions are defined across at least a portion of a material. Sonic energy is sequentially irradiated across the plurality of positions. Echoes are induced by the sonic energy, and detected. At least some of the detected echoes are associated with individual positions of the plurality of positions that triggered the detected echoes. Information pertaining to at least one physical attribute of the detected echoes is processed to sort the detected echoes into a first group indicative of inhomogeneities in the material, and a second group which does not indicate inhomogeneities in the material. The echoes of the first group are sorted into clusters, with the clusters being defined as echoes from adjacent positions of the plurality of positions.