Patents by Inventor Russell E. Lewis

Russell E. Lewis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer
    Patent number: 5308447
    Abstract: Techniques of monitoring and controlling removal or forming of layers of material, such as employed in the manufacture of flat panel displays and integrated circuit wafers. Examples of material removal include the development of a photoresist layer and etching of layers of other material according to a pattern across the surface of the layer. The material removal process is terminated in response to detecting when breakthrough occurs in a preselected number of individual regions across the surface of the layer. A measure of uniformity of processing across the layer surface is obtained from monitoring removal of material in such individual surface regions, and can be used to control the process to improve such uniformity.
    Type: Grant
    Filed: June 9, 1992
    Date of Patent: May 3, 1994
    Assignee: Luxtron Corporation
    Inventors: Russell E. Lewis, Richard E. Howard, Herbert E. Litvak