Patents by Inventor Ruud Martinus VAN DER HORST

Ruud Martinus VAN DER HORST has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation sensor apparatus
    Patent number: 10900829
    Abstract: A radiation sensor apparatus for determining a position and/or power of a radiation beam, the radiation sensor apparatus including a chamber to contain a gas, one or more sensors, and a processor. The chamber has a first opening and a second opening such that a radiation beam can enter the chamber through the first opening, propagate through the chamber generally along an axis, and exit the chamber through the second opening. Each of the one or more sensors is arranged to receive and detect radiation emitted from a region of the chamber around the axis. The processor is operable to use the radiation detected by the one or more sensors to determine a position and/or power of the radiation beam.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: January 26, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Vadim Yevgenyevich Banine, Gerrit Jacobus Hendrik Brussaard, Willem Jakobus Cornelis Koppert, Otger Jan Luiten, Han-Kwang Nienhuys, Job Beckers, Ruud Martinus Van Der Horst
  • RADIATION SENSOR APPARATUS
    Publication number: 20190353521
    Abstract: A radiation sensor apparatus for determining a position and/or power of a radiation beam, the radiation sensor apparatus including a chamber to contain a gas, one or more sensors, and a processor. The chamber has a first opening and a second opening such that a radiation beam can enter the chamber through the first opening, propagate through the chamber generally along an axis, and exit the chamber through the second opening. Each of the one or more sensors is arranged to receive and detect radiation emitted from a region of the chamber around the axis. The processor is operable to use the radiation detected by the one or more sensors to determine a position and/or power of the radiation beam.
    Type: Application
    Filed: July 30, 2019
    Publication date: November 21, 2019
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Vadim Yevgenyevich Banine, Gerrit Jacobus Hendrik Brussaard, Willem Jakobus Cornelis Koppert, Otger Jan Luiten, Han-Kwang Nienhuys, Job Beckers, Ruud Martinus Van Der Horst
  • Radiation sensor apparatus
    Patent number: 10422691
    Abstract: A radiation sensor apparatus for determining a position and/or power of a radiation beam, the radiation sensor apparatus including a chamber to contain a gas, one or more sensors, and a processor. The chamber has a first opening and a second opening such that a radiation beam can enter the chamber through the first opening, propagate through the chamber generally along an axis, and exit the chamber through the second opening. Each of the one or more sensors is arranged to receive and detect radiation emitted from a region of the chamber around the axis. The processor is operable to use the radiation detected by the one or more sensors to determine a position and/or power of the radiation beam.
    Type: Grant
    Filed: February 2, 2016
    Date of Patent: September 24, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Vadim Yevgenyevich Banine, Willem Jakobus Cornelis Koppert, Han-Kwang Nienhuys, Ruud Martinus Van Der Horst
  • RADIATION SENSOR APPARATUS
    Publication number: 20180058928
    Abstract: A radiation sensor apparatus for determining a position and/or power of a radiation beam, the radiation sensor apparatus including a chamber to contain a gas, one or more sensors, and a processor. The chamber has a first opening and a second opening such that a radiation beam can enter the chamber through the first opening, propagate through the chamber generally along an axis, and exit the chamber through the second opening. Each of the one or more sensors is arranged to receive and detect radiation emitted from a region of the chamber around the axis. The processor is operable to use the radiation detected by the one or more sensors to determine a position and/or power of the radiation beam.
    Type: Application
    Filed: February 2, 2016
    Publication date: March 1, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Vadim Yevgenyevich BANINE, Gerrit Jacobus Hendrik BRUSSAARD, Willem Jakobus Cornelis KOPPERT, Otger Jan LUITEN, Han-Kwang NIENHUYS, Job BECKERS, Ruud Martinus VAN DER HORST