Abstract: An etching method includes: (a) providing a substrate having an etching target film and a mask on the etching target film to a substrate support in a plasma processing apparatus including a chamber, the substrate support, a plasma generator supplied with source power, and a bias electrode supplied with bias power; and (b) forming a recess by etching the etching target film. In (b), the source power and the bias power are periodically supplied in a cycle that includes a first period and a second period. In the first period, the etching target film is etched, and in the second period, the second processing gas is adsorbed onto the etching target film.

Abstract: An electromagnetic wave visualization device includes an image acquisition unit that captures an image of a target device, a measurement unit that measures an electromagnetic wave intensity of the target device, a controller that sets a measurement range of the measurement unit and generates a composite image in which a measurement result of the measured electromagnetic wave intensity is superimposed on the captured image of the target device acquired by the image acquisition unit, and an output unit that outputs the composite image generated by the controller, in which the controller generates the composite image including the measurement range of the measurement unit and outputs the composite image to the output unit.

Abstract: In one exemplary embodiment, there is provided an etching method. The method includes (a) preparing a substrate, the substrate comprising a silicon-containing film and a mask, the silicon-containing film including a recess, the mask being provided on the silicon-containing film and including an opening that exposes the recess; (b) forming a carbon-containing film on a side wall of the silicon-containing film, the side wall defining the recess; and (c) by using a plasma generated from a processing gas, forming a protective film containing tungsten on the carbon-containing film and etching the silicon-containing film in the recess, the processing gas including a fluorine-containing gas and a tungsten-containing gas.

Abstract: A temperature changing method includes changing a pressure of a gas supplied from a gas supply to a gap between the substrate and an electrostatic chuck from a first pressure to a second pressure being lower than the first pressure, changing a voltage applied to the electrostatic chuck from a first voltage to a second voltage being lower than the first voltage, changing a temperature of the electrostatic chuck from a first temperature to a second temperature, electrostatically attracting the substrate by the electrostatic chuck for a time in a state where the gas pressure is the second pressure and the voltage is the second voltage, changing the gas pressure from the second pressure to a third pressure being lower than the first pressure and higher than the second pressure, and changing the voltage from the second voltage to a third voltage being higher than the second voltage.

Abstract: A temperature control method of a chamber of a plasma processing apparatus includes: (a) providing a substrate in the chamber; (b) measuring a pre-processing temperature of an internal component of the chamber; (c) determining a temperature control condition based on a difference between the pre-processing temperature measured in (b) and a target temperature that has been preset in advance; (d) performing a process including at least one of increasing the temperature of the internal component by a first plasma of a first processing gas and cooling the internal component by purging the chamber with a cooling gas, based on the temperature control condition; and (e) processing the substrate with a second plasma of a second processing gas.

Abstract: A leakage electric field measurement device includes a first acquirer that measures a distance to an electric wire, a second acquirer that measures a leakage electric field of the electric wire, a third acquirer that acquires a captured image of the electric wire, and a controller that calculates a predicted value of the leakage electric field of the electric wire on the basis of the distance measured by the first acquirer and the leakage electric field measured by the second acquirer, performs determination of whether or not the electric wire is a live wire according to comparison between an assumed electric field of the electric wire and the predicted value, and generates a composite image in which a result of the determination is superimposed on the captured image acquired by the third acquirer.

Abstract: An electromagnetic wave visualization device includes an image acquisition unit that captures an image of a target device, a measurement unit that measures an electromagnetic wave intensity of the target device, a controller that sets a measurement range of the measurement unit and generates a composite image in which a measurement result of the measured electromagnetic wave intensity is superimposed on the captured image of the target device acquired by the image acquisition unit, and an output unit that outputs the composite image generated by the controller, in which the controller generates the composite image including the measurement range of the measurement unit and outputs the composite image to the output unit.

Abstract: A leakage electric field measurement device includes a first acquirer that measures an intensity of a leakage electric field, a second acquirer that measures a distance to at least one target object, a third acquirer that acquires a captured image of the at least one target object, and a controller that generates a composite image in which a measurement result of the intensity of the leakage electric field measured by the first acquirer and a measurement location corresponding to a shortest distance among distances measured by the second acquirer are superimposed on the captured image acquired by the third acquirer.

Abstract: An electromagnetic wave visualization device includes an image acquisition unit that captures an image of a target device, a measurement unit that measures an electromagnetic wave intensity of the target device, a controller that generates a composite image in which a measurement result of the electromagnetic wave intensity measured by the measurement unit is superimposed on the captured image of the target device acquired by the image acquisition unit, an output unit that outputs the composite image, and a distance measuring unit that measures a distance from the measurement unit to the target device. The controller determines, whether or not the distance measured by the distance measuring unit is within a predetermined distance at which the electromagnetic wave intensity in the frequency bandwidth is measurable, generates an alert in a case where the distance is not within the predetermined distance, and causes the output unit to output the alert.

Abstract: An image reading device includes a magnetizer that magnetizes a metal object attached to a document, a magnetism detector that is disposed on the downstream side of the magnetizer in a document transport direction from a document stacking table toward the document transport path and detects residual magnetism of the metal object, and a metal object accompaniment determination unit that determines whether or not the metal object is attached to the document based on a detection result by the magnetism detector.

Abstract: A monitoring apparatus for an energy storage device provided at a movable body and electrically connected to a load of the movable body via a switch, the monitoring apparatus comprising: a monitoring unit supplied with power from the energy storage device; wherein the monitoring unit executes monitoring operation of bringing the switch from a closed state into an opened state under a condition that the energy storage device has voltage not more than a discharge voltage threshold, and bringing the switch from the opened state into the closed state under a condition that the switch is in the opened state and the energy storage device satisfies a predetermined discharge recovery condition, and extends an interval of the monitoring operation when the movable body is parked while the switch is in the opened state, in comparison to a case where the movable body is not parked.

Abstract: A temperature changing method includes changing a pressure of a gas supplied from a gas supply to a gap between the substrate and an electrostatic chuck from a first pressure to a second pressure being lower than the first pressure, changing a voltage applied to the electrostatic chuck from a first voltage to a second voltage being lower than the first voltage, changing a temperature of the electrostatic chuck from a first temperature to a second temperature, electrostatically attracting the substrate by the electrostatic chuck for a time in a state where the gas pressure is the second pressure and the voltage is the second voltage, changing the gas pressure from the second pressure to a third pressure being lower than the first pressure and higher than the second pressure, and changing the voltage from the second voltage to a third voltage being higher than the second voltage.

Abstract: The lubricating oil composition for a refrigerator of the present invention is used with a refrigerant containing carbon dioxide, and contains a base oil (A) containing a polyoxyalkylene glycol as a major component, and an alcohol (B) having at least one hydroxy group, in which a total number of the hydroxy group and an ether bond is from 2 to 3 (provided that the number of an ether bond may be 0).

Abstract: A monitoring apparatus for an energy storage device provided at a movable body and electrically connected to a load of the movable body via a switch, the monitoring apparatus comprising: a monitoring unit supplied with power from the energy storage device; wherein the monitoring unit executes monitoring operation of bringing the switch from a closed state into an opened state under a condition that the energy storage device has voltage not more than a discharge voltage threshold, and bringing the switch from the opened state into the closed state under a condition that the switch is in the opened state and the energy storage device satisfies a predetermined discharge recovery condition, and extends an interval of the monitoring operation when the movable body is parked while the switch is in the opened state, in comparison to a case where the movable body is not parked.

Abstract: The lubricating oil composition for a refrigerator of the present invention is used with a refrigerant containing carbon dioxide, and contains a base oil (A) containing a polyoxyalkylene glycol as a major component, and an alcohol (B) having at least one hydroxy group, in which a total number of the hydroxy group and an ether bond is from 2 to 3 (provided that the number of an ether bond may be 0).

Abstract: A monitoring apparatus for an energy storage device provided at a movable body and electrically connected to a load of the movable body via a switch, includes a monitoring unit supplied with power from the energy storage device. The monitoring unit executes monitoring operation of bringing the switch from a closed state into an opened state under a condition that the energy storage device has voltage not more than a discharge voltage threshold, and bringing the switch from the opened state into the closed state under a condition that the switch is in the opened state and the energy storage device satisfies a predetermined discharge recovery condition, and decreases power consumption by extending an interval of the monitoring operation when the load is under suspension while the switch is in the opened state, in comparison to a case where the load is in operation.

Abstract: A drilling method for forming a plurality of through-holes in a plate member includes: a first step of fixing at least one jig, which has a clearance hole, on a bed of a machine tool; a second step of placing the plate member on the at least one jig and fixing the plate member on the bed; a third step of operating the machine tool so that a leading end portion of a drilling tool of the machine tool is inserted into the clearance hole, and forming a first through-hole at a position of the plate member corresponding to the clearance hole; a fourth step of passing a fixing member through the first through-hole, and fixing the plate member on the at least one jig using the fixing member; and a fifth step of operating the machine tool to form a second through-hole other than the first through-hole.

Abstract: An image reading device includes a magnetizer that magnetizes a metal object attached to a document, a magnetism detector that is disposed on the downstream side of the magnetizer in a document transport direction from a document stacking table toward the document transport path and detects residual magnetism of the metal object, and a metal object accompaniment determination unit that determines whether or not the metal object is attached to the document based on a detection result by the magnetism detector.

Abstract: An image reading device includes: an FB glass; a sensor module having a light source and a plurality of sensors; and an image processor that generates correction data to be used for shading correction and performs the shading correction on image signals by using the correction data. The plurality of sensors is arranged in a main scanning direction and is configured to form an image signal on a single line. The image processor acquires second black data by causing the plurality of sensors to acquire an image signal of a reference sheet placed on the FB glass with the light source turned on, and generates black correction data based on the second black data. By performing the shading correction by using the black correction data, the image processor corrects density unevenness, in an image, caused by interference between image signals from the plurality of sensors.

Abstract: A variable displacement type swash plate compressor includes a housing having therein a suction chamber, a discharge chamber, a control pressure chamber, a shaft hole, and cylinder bores. The compressor further has a drive shaft, a swash plate, an inclination angle changing mechanism, pistons, introduction passages, and a valve mechanism. The valve mechanism includes a valve element is disposed in a passage connecting the control pressure chamber and the suction chamber. The valve element is integrally rotatable with the drive shaft and axially movable by a pressure difference across the valve element. An opening of the residual gas bypass passage is changed by the axial movement of the valve element. The valve element selectively connects and disconnects the introduction passages with the residual gas bypass passage.