Abstract: A vaporization system without a pressure sensor including: a vaporizer that vaporizes the liquid material; a supply amount controller that controls the supply amount of the liquid material to the vaporizer; a flow rate regulation valve that regulates the flow rate of vaporized gas produced by the vaporizer; a flow rate sensor that measures the flow rate of the vaporized gas; and a valve control part that outputs a drive signal to the flow rate regulation valve to control a valve opening level so that a measured flow rate measured by the flow rate sensor becomes equal to a predetermined set flow rate, is adapted to acquire a drive signal value that is a value indicated by the drive signal; and output a control signal to the supply amount controller on the basis of the drive signal value and control the supply of the liquid material.

Abstract: In order to make it possible to accurately detect the liquid level of a liquid material in a container, a vaporization device is adapted to include: a container 10 that contains a liquid material X; a heater 30 that heats the liquid material X in the container 10; and a liquid level sensor 20 that detects the liquid level of the liquid material in the container 10, in which when viewing the inside of the container 10 from above, a vaporization region S1 in which the liquid material X is vaporized, and a liquid level stable region S2 different from the vaporization region S1 are configured to be formed, and the liquid level sensor 20 detects the liquid level of the liquid material X in the liquid level stable region S2.

Abstract: A vaporization system without a pressure sensor including: a vaporizer that vaporizes the liquid material; a supply amount controller that controls the supply amount of the liquid material to the vaporizer; a flow rate regulation valve that regulates the flow rate of vaporized gas produced by the vaporizer; a flow rate sensor that measures the flow rate of the vaporized gas; and a valve control part that outputs a drive signal to the flow rate regulation valve to control a valve opening level so that a measured flow rate measured by the flow rate sensor becomes equal to a predetermined set flow rate, is adapted to acquire a drive signal value that is a value indicated by the drive signal; and output a control signal to the supply amount controller on the basis of the drive signal value and control the supply of the liquid material.