Publication number: 20230384165
Abstract: Disclosed is a bolometer type infrared detector comprising: a substrate, a bolometer film comprising semiconducting carbon nanotubes, and two electrodes spaced from each other and connected to the bolometer film, wherein at least one of the two electrodes is formed of a metal alloy comprising at least two metals selected from the group consisting of Li, Be, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Y, Zr, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Sb, Ba, La, Hf, Ta, Ir, Pt, Au, and Bi.
Type:
Application
Filed:
May 24, 2023
Publication date:
November 30, 2023
Applicant:
NEC Corporation
Inventors:
Tomo TANAKA, Masahiko ISHIDA, Ryota YUGE