Patents by Inventor Ryouhei Hasegawa

Ryouhei Hasegawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacture of synthetic quartz glass substrate
    Patent number: 9616542
    Abstract: A rough surface of a starting synthetic quartz glass substrate is polished to a mirror finish, using a polishing slurry containing tetragonal or cubic zirconia.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: April 11, 2017
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Ryouhei Hasegawa, Harunobu Matsui, Daijitsu Harada, Masaki Takeuchi
  • Treatment of synthetic quartz glass substrate
    Patent number: 8951386
    Abstract: A synthetic quartz glass substrate having a resist film coated thereon is treated by immersing it in a terpene-containing solvent until the resist film is released, and rinsing the substrate with water.
    Type: Grant
    Filed: June 17, 2011
    Date of Patent: February 10, 2015
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Harunobu Matsui, Ryouhei Hasegawa, Masaki Takeuchi
  • TREATMENT OF SYNTHETIC QUARTZ GLASS SUBSTRATE
    Publication number: 20110308737
    Abstract: A synthetic quartz glass substrate having a resist film coated thereon is treated by immersing it in a terpene-containing solvent until the resist film is released, and rinsing the substrate with water.
    Type: Application
    Filed: June 17, 2011
    Publication date: December 22, 2011
    Inventors: Harunobu MATSUI, Ryouhei Hasegawa, Masaki Takeuchi