Patents by Inventor Ryuichi CHIKAMORI

Ryuichi CHIKAMORI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus
    Patent number: 10216099
    Abstract: A substrate processing apparatus includes an indexer block, a first processing block, a second processing block, and an interface block. The indexer block includes a pair of carrier platforms and a transport section. A carrier storing a plurality of substrates in multiple stages is placed in each of the carrier platforms. The transport section includes transport mechanisms. The transport mechanisms concurrently transport the substrates.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: February 26, 2019
    Assignee: SCREEN Semiconductor Solutions Co., Ltd.
    Inventors: Kazuhiro Nishimura, Yasushi Nakamura, Yasuo Kawamatsu, Ryuichi Chikamori
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20170008017
    Abstract: A substrate processing apparatus includes an indexer block, a first processing block, a second processing block, and an interface block. The indexer block includes a pair of carrier platforms and a transport section. A carrier storing a plurality of substrates in multiple stages is placed in each of the carrier platforms. The transport section includes transport mechanisms. The transport mechanisms concurrently transport the substrates.
    Type: Application
    Filed: September 26, 2016
    Publication date: January 12, 2017
    Inventors: Kazuhiro NISHIMURA, Yasushi NAKAMURA, Yasuo KAWAMATSU, Ryuichi CHIKAMORI
  • Substrate processing apparatus
    Patent number: 9494877
    Abstract: A substrate processing apparatus includes an indexer block, a first processing block, a second processing block, and an interface block. The indexer block includes a pair of carrier platforms and a transport section. A carrier storing a plurality of substrates in multiple stages is placed in each of the carrier platforms. The transport section includes transport mechanisms. The transport mechanisms concurrently transport the substrates.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: November 15, 2016
    Assignee: SCREEN Semiconductor Solutions Co., Ltd.
    Inventors: Kazuhiro Nishimura, Yasushi Nakamura, Yasuo Kawamatsu, Ryuichi Chikamori
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20120249990
    Abstract: A substrate processing apparatus includes an indexer block, a first processing block, a second processing block, and an interface block. The indexer block includes a pair of carrier platforms and a transport section. A carrier storing a plurality of substrates in multiple stages is placed in each of the carrier platforms. The transport section includes transport mechanisms. The transport mechanisms concurrently transport the substrates.
    Type: Application
    Filed: March 9, 2012
    Publication date: October 4, 2012
    Inventors: Kazuhiro NISHIMURA, Yasushi NAKAMURA, Yasuo KAWAMATSU, Ryuichi CHIKAMORI