Abstract: A pump device and method for stabilizing a suction flow rate irrespective of an outside air temperature. The method includes: outputting a drive signal for driving a motor at a rotation speed for discharging gas of the reference flow rate from the suction port of the pump main body; measuring a temperature of gas discharged from the suction port or a temperature of the pump main body by a temperature sensor attached to the pump main body; calculating an actual flow rate of the gas discharged from the suction port based on a temperature signal relating to the temperature of the gas included in an output of the temperature sensor; and correcting the drive signal such that the actual flow rate equals the reference flow rate and outputting the corrected drive signal to the motor.

Abstract: To provide a pump device capable of limiting discharge of a fluid when the operation is stopped. A pump device (3) includes a casing (10), a movable member (30), a suction valve (41), a discharge valve (42), and a valve mechanism (50). The casing (10) includes a suction port (101), a discharge port (102), and a pump chamber (100). The movable member (30) is movable within the casing (10) and alternately performs suction and discharge of a fluid into and from the pump chamber (100). The discharge valve (42) is attached between the pump chamber (100) and the discharge port (102) and permits the fluid having a first pressure or higher to flow. The valve mechanism (50) is attached to the casing (10) and limits a flow of the fluid having a second pressure or lower.

Abstract: [Object] To provide a pump device capable of stabilizing a suction flow rate irrespective of an outside air temperature and a control method therefor. [Solving Means] The control method for a pump device includes: outputting a drive signal for driving a motor at a rotation speed for discharging gas of the reference flow rate from the suction port of the pump main body; measuring a temperature of gas discharged from the suction port or a temperature of the pump main body by a temperature sensor attached to the pump main body; calculating an actual flow rate of the gas discharged from the suction port based on a temperature signal relating to the temperature of the gas included in an output of the temperature sensor; and correcting the drive signal such that the actual flow rate equals the reference flow rate and outputting the corrected drive signal to the motor.

Abstract: A pump device (1) according to an embodiment of the present invention includes a drive motor (M), a first pump unit for evacuation (11) including a first pump chamber and a first piston (21v), and a second pump unit for pressurization (12) including a second pump chamber and a second piston (21c). The second piston (21c) has a phase advanced with a rotational phase difference (?) of more than 0° and less than 80° with respect to the first piston (21v).

Abstract: The pump device has a driving member with one end connected to a diaphragm and another end connected to a driving mechanism. The driving mechanism side end repeats reciprocating motion along first axial direction and oscillation in second axial direction. The diaphragm side end performs the reciprocating motion in the first axial direction, and a problem is that the diaphragm easily deteriorates to be cut in a direction in which the diaphragm can be easily stretched, for example, in the second axial direction for performing oscillation. By embedding the base fabric having the fiber which extends in the second axial direction into the diaphragm, the strength in the second axial direction and the durability can be improved. By providing the index part to indicate the second axial direction, the extending direction of the fiber of the base fabric embedded within the diaphragm becomes distinguishable.