Patents by Inventor Ryuta Nishizawa
Ryuta Nishizawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240113690Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first film formation step of forming a first stacked body by sequentially stacking a first underlying film, a second underlying film, and a first protective film at the first surface, a first patterning step of patterning the first stacked body in a manner in which the first underlying film, the second underlying film, and the first protective film remain in a region of an element formation region other than a first groove formation region and a second groove formation region, the first underlying film and the second underlying film remain in the first groove formation region, and the first underlying film remains in the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first stacked body.Type: ApplicationFiled: September 27, 2023Publication date: April 4, 2024Inventors: Tsukasa Watanabe, Keiichi Yamaguchi, Shigeru Shiraishi, Ryuta Nishizawa
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Publication number: 20240110786Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface that are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the first surface, the first protective film having a first opening overlapping a first groove formation region and a second opening overlapping a second groove formation region, in which a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film.Type: ApplicationFiled: September 27, 2023Publication date: April 4, 2024Inventors: Hiyori Sakata, Keiichi Yamaguchi, Ryuta Nishizawa, Shigeru Shiraishi
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Publication number: 20240110787Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the quartz crystal substrate at the first surface where the vibrator is formed; and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film. R1>R2, in which R1 is a thickness of the first protective film in a first groove formation region of the quartz crystal substrate where the first groove is formed and R2 is a thickness of the first protective film in the second groove formation region where the second groove is formed.Type: ApplicationFiled: September 27, 2023Publication date: April 4, 2024Inventors: Kosuke Ariizumi, Keiichi Yamaguchi, Shigeru Shiraishi, Ryuta Nishizawa
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Publication number: 20240113691Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as an element formation region, a region where the first groove is formed is referred to as a first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a second protective film formation step of forming, in the first groove formation region, a second protective film having a lower etching rate than the first protective film, a third protective film formation step of forming a third protective film in a region of the element formation region other than the first groove formation region and the second groove formation region, and a first dry etching stType: ApplicationFiled: September 27, 2023Publication date: April 4, 2024Inventors: Tsukasa Watanabe, Keiichi Yamaguchi, Shigeru Shiraishi, Ryuta Nishizawa
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Publication number: 20240113692Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a region of an element formation region other than a first groove formation region and a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film, a second protective film formation step of forming a second protective film in the first groove formation region, and a second dry etching step of dry etching the quartz crystal substrateType: ApplicationFiled: September 27, 2023Publication date: April 4, 2024Inventors: Tsukasa Watanabe, Keiichi Yamaguchi, Shigeru Shiraishi, Ryuta Nishizawa
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Patent number: 11940275Abstract: A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.Type: GrantFiled: April 12, 2022Date of Patent: March 26, 2024Assignee: SEIKO EPSON CORPORATIONInventors: Seiichiro Ogura, Keiichi Yamaguchi, Ryuta Nishizawa
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Publication number: 20240069057Abstract: An angular velocity detection element includes: a drive vibration arm configured to perform flexural vibration according to an applied drive signal; and a detection vibration arm configured to perform flexural vibration according to an applied angular velocity. Each of the drive vibration arm and the detection vibration arm has a bottomed groove portion along an extending direction. d2/t2>d1/t1, in which t1 is a thickness of the drive vibration arm, d1 is a depth of the groove portion of the drive vibration arm, t2 is a thickness of the detection vibration arm, and d2 is a depth of the groove portion of the detection vibration arm.Type: ApplicationFiled: August 28, 2023Publication date: February 29, 2024Inventors: Seiichiro OGURA, Keiichi YAMAGUCHI, Ryuta NISHIZAWA
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Patent number: 11916538Abstract: A vibrator device includes a vibrating body having obverse and reverse principal surfaces and a side surface connecting the obverse and reverse principal surfaces to each other, a package configured to house the vibrating body, and a bonding material configured to fix the vibrating body to the package, wherein the vibrating body has a coupling part including a recess recessed from the side surface toward a center of the principal surfaces, and a protrusion protruding from a side surface of the recess, the protrusion is one of breaking-off parts with which a plurality of the vibrating bodies is broken off from a wafer to which the plurality of the vibrating bodies is coupled, and the bonding material has contact with a side surface of the protrusion in the recess.Type: GrantFiled: January 19, 2021Date of Patent: February 27, 2024Assignee: SEIKO EPSON CORPORATIONInventors: Seiichiro Ogura, Keiichi Yamaguchi, Ryuta Nishizawa
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Publication number: 20240056053Abstract: A manufacturing method for a vibrator element includes a preparation step of preparing a quartz crystal substrate having a first substrate surface and a second substrate surface, a first protective film formation step of forming a first protective film in first groove formation areas of the first substrate surface, a second protective film formation step of forming a second protective film in an area except the first groove formation areas of a first vibrating arm formation area and a second vibrating arm formation area of the first substrate surface, and a first dry etching step of dry etching the quartz crystal substrate from the first substrate surface side via the first protective film and the second protective film and forming a first surface, first grooves, and outer shapes of the first vibrating arm and the second vibrating arm, wherein r1>r2, where an etching rate of the first protective film is r1 and an etching rate of the second protective film is r2.Type: ApplicationFiled: August 9, 2023Publication date: February 15, 2024Inventors: Keiichi YAMAGUCHI, Hiyori SAKATA, Shigeru SHIRAISHI, Ryuta NISHIZAWA
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Publication number: 20240014798Abstract: A resonator device includes: a resonator; an integrated circuit device configured to oscillate the resonator and to generate an oscillation signal; a container accommodating the resonator and the integrated circuit device; and a metal bump bonded to the integrated circuit device and electrically coupling the integrated circuit device and the container. The integrated circuit device includes a pad bonded to the metal bump, and a circuit disposed at a position overlapping the metal bump in a plan view of the pad, and W1/W2?1.08, where W1 represents a width of the pad, and W2 represents a width of the metal bump.Type: ApplicationFiled: July 6, 2023Publication date: January 11, 2024Inventors: Taichi Fujinami, Ryuta Nishizawa, Shinya Aoki, Shoichiro Kasahara
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Patent number: 11831277Abstract: A resonator device includes a resonator element, a base which has a first surface and a second surface that are in front-back relation, and in which the resonator element is arranged at the first surface, an integrated circuit provided to the base, a lid which has an inner surface opposed to the resonator element, and an outer surface in a front-back relationship with the inner surface, and which is bonded to the base so as to house the resonator element, and a radiation layer which is arranged at the inner surface of the lid, and is higher in emissivity than the lid.Type: GrantFiled: May 27, 2022Date of Patent: November 28, 2023Inventors: Ryuta Nishizawa, Junichi Takeuchi
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Patent number: 11722098Abstract: A vibrator includes: a vibration element that includes a pair of first excitation electrodes formed at the first vibration portion, a pair of second excitation electrodes formed at the second vibration portion, and a pair of third excitation electrodes formed at the third vibration portion, in which one second excitation electrode of the pair of second excitation electrodes is formed at a first inclined surface that is inclined with respect to two main surfaces, and one third excitation electrode of the pair of third excitation electrodes is formed at a second inclined surface that is inclined with respect to the two main surfaces and the first inclined surface; and a package that houses the vibration element. The vibration element includes a fixing portion to be fixed to the package. The fixing portion is provided between the first vibration portion and the second and third vibration portions.Type: GrantFiled: March 10, 2022Date of Patent: August 8, 2023Assignee: SEIKO EPSON CORPORATIONInventors: Atsushi Matsuo, Ryuta Nishizawa
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Publication number: 20230188109Abstract: Provided is a method for manufacturing a vibrator element including a first vibration arm and a second vibration arm that each have a first surface and a second surface. The manufacturing method includes a preparation step of preparing a quartz crystal substrate, a first protective film forming step of forming a first protective film on a first substrate surface of the quartz crystal substrate, a first dry etching step of dry etching the quartz crystal substrate via the first protective film, a second protective film forming step of forming a second protective film on a second substrate surface of the quartz crystal substrate, and a second dry etching step of dry etching the quartz crystal substrate via the second protective film. Outer shapes of the first vibration arm and the second vibration arm are formed from the first surface to the second surface in the first dry etching step, and the outer shapes of the first vibration arm and the second vibration arm are not formed in the second dry etching step.Type: ApplicationFiled: December 8, 2022Publication date: June 15, 2023Inventors: Keiichi YAMAGUCHI, Hiyori SAKATA, Shigeru SHIRAISHI, Ryuta NISHIZAWA
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Publication number: 20230179164Abstract: A method for manufacturing a vibrator element includes a first protective film forming step of forming a first protective film on a first substrate surface of a quartz crystal substrate, a first dry etching step of dry etching the quartz crystal substrate from a first substrate surface side to form a first groove and outer shapes of a first and second vibration arms, a second protective film forming step of forming a second protective film on a second substrate surface of the quartz crystal substrate, and a second dry etching step of dry etching the quartz crystal substrate from a second substrate surface side to form a second groove and outer shapes of the first and second vibration arms. In the first dry etching step, the outer shapes of the first and second vibration arms are formed to be closer to the second substrate surface than is a position where a bottom surface of the second groove is formed.Type: ApplicationFiled: December 1, 2022Publication date: June 8, 2023Inventors: Keiichi YAMAGUCHI, Hiyori SAKATA, Shigeru SHIRAISHI, Ryuta NISHIZAWA
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Patent number: 11662204Abstract: A vibrator device includes a vibrating body having a first surface, a package having a second surface opposed to the first surface of the vibrating body, a circuit board provided to the package so as to be opposed to the first surface of the vibrating body, a plurality of coupling electrodes provided to the first surface of the vibrating body, a first coupling line provided to the second surface of the package, a second coupling line provided to the circuit board, and a bonding material electrically coupling the coupling electrode and the first coupling line to each other, wherein the vibrating body has a protrusion protruding toward the package farther than the coupling electrode at the first surface side, and the protrusion has contact with the second surface of the package.Type: GrantFiled: January 22, 2021Date of Patent: May 30, 2023Assignee: SEIKO EPSON CORPORATIONInventors: Seiichiro Ogura, Keiichi Yamaguchi, Ryuta Nishizawa
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Patent number: 11650054Abstract: Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.Type: GrantFiled: February 24, 2022Date of Patent: May 16, 2023Inventors: Ryuta Nishizawa, Seiichiro Ogura, Keiichi Yamaguchi
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Publication number: 20230145942Abstract: A vibration element includes a vibrating part, and a support part which is coupled to the vibrating part to support the vibrating part, wherein the vibrating part and the support part have a first surface and a second surface having a front and back relationship with the first surface, a first electrode is disposed on the first surface, the first electrode includes a first layer as a foundation layer, and a second layer as an upper layer of the first layer, when performing zoning into a first area where the first electrode is not disposed, a second area where the first layer and the second layer are stacked on one another, and a third area where the first layer is formed, identification symbols formed of two or more of the first to third areas are disposed, and an identification code formed of a plurality of the identification symbols is provided.Type: ApplicationFiled: November 9, 2022Publication date: May 11, 2023Inventors: Takuro Kobayashi, Keiichi Yamaguchi, Ryuta Nishizawa
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Publication number: 20230134199Abstract: A method for manufacturing a vibration element including first and second vibrating arms each having a first surface and a second surface that are front and rear sides with respect to each other and a bottomed groove that opens via the first surface, the method including a first protective film formation step of forming a first protective film, a first dry etching step of performing dry etching via the first protective film to form grooves and the outer shapes of the first and second vibrating arms, a second protective film formation step of forming a second protective film in the grooves, and a second dry etching step of performing dry etching via the second protective film to form the first surface and the outer shapes of the first and second vibrating arms.Type: ApplicationFiled: October 27, 2022Publication date: May 4, 2023Inventors: Keiichi YAMAGUCHI, Hiyori SAKATA, Shigeru SHIRAISHI, Ryuta NISHIZAWA
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Publication number: 20230139098Abstract: A method for manufacturing a vibration element including a first protective film formation step of forming a first protective film, a first dry etching step of performing dry etching via the first protective film to form first grooves and the outer shapes of vibrating arms, a second protective film formation step of forming a second protective film in the first grooves, a second dry etching step of performing dry etching via the second protective film, a third protective film formation step of forming a third protective film, a third dry etching step of performing dry etching via the third protective film to form second grooves and the outer shapes of the vibrating arms, a fourth protective film formation step of forming a fourth protective film in the second grooves, and a fourth dry etching step of performing dry etching via the fourth protective film.Type: ApplicationFiled: October 27, 2022Publication date: May 4, 2023Inventors: Keiichi YAMAGUCHI, Hiyori SAKATA, Shigeru SHIRAISHI, Ryuta NISHIZAWA
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Publication number: 20230127801Abstract: A method for manufacturing a vibration element includes, a base film forming step of forming a first base film at a first substrate surface of a quartz crystal substrate in first and second vibrating arm forming regions, a protective film forming step of forming a first protective film in a bank portion forming region of the first base film, and a dry-etching step of dry-etching the quartz crystal substrate through the first base film and the first protective film.Type: ApplicationFiled: October 21, 2022Publication date: April 27, 2023Inventors: Shigeru SHIRAISHI, Hiyori SAKATA, Keiichi YAMAGUCHI, Ryuta NISHIZAWA