Patents by Inventor Ryuzoh Houchin

Ryuzoh Houchin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microwave plasma processor
    Patent number: 5202095
    Abstract: A microwave plasma processor comprising a vacuum chamber with a gas introduction inlet, an exhaust port, a sample table for loading thereon a sample, a plurality of microwave radiation antennas, and a corresponding plurality of microwave energy introduction inlets thereby enabling a large area substrate to be uniformly plasma-processed at high speed.
    Type: Grant
    Filed: March 27, 1992
    Date of Patent: April 13, 1993
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Ryuzoh Houchin, Naoki Suzuki