Patents by Inventor Sachiko Miyama

Sachiko Miyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical proximity correction system
    Patent number: 6077310
    Abstract: Pattern data that is an object of correction is divided into an area on which correction is made using correction values that have been obtained in advance for patterns and their respective layouts and an area on which correction is made on the basis of correction values calculated by a simulator. For example, simulation-based correction is made on a gate layer in a memory, while rule-based correction is made on a gate layer in the other area than the memory on the basis of rules for active gate width only. After being subjected to the correction, the areas are combined.
    Type: Grant
    Filed: January 29, 1999
    Date of Patent: June 20, 2000
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kazuko Yamamoto, Sachiko Miyama, Kiyomi Koyama, Soichi Inoue
  • Optical proximity correction method
    Patent number: 5879844
    Abstract: Pattern data that is an object of correction is divided into an area on which correction is made using correction values that have been obtained in advance for patterns and their respective layouts and an area on which correction is made on the basis of correction values calculated by a simulator. For example, simulation-based correction is made on a gate layer in a memory, while rule-based correction is made on a gate layer in the other area than the memory on the basis of rules for active gate width only. After being subjected to the correction, the areas are combined.
    Type: Grant
    Filed: December 20, 1996
    Date of Patent: March 9, 1999
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kazuko Yamamoto, Sachiko Miyama, Kiyomi Koyama, Soichi Inoue