Patents by Inventor Sachin M. Chinchwadkar

Sachin M. Chinchwadkar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition of integrated circuit fabrication materials using a print head
    Patent number: 7091134
    Abstract: In one embodiment, an integrated circuit (IC) fabrication material is dispensed from a print head by dividing its nozzles into several groups, and sequentially allowing each group to fire. The nozzles may be grouped based on the amounts of material they dispense. For example, the nozzles may be grouped by drop volume or drop mass. In one embodiment, an IC fabrication material is dispensed on a substrate by controlling a firing sequence of a nozzle to promote merging of material on the substrate. The firing sequence may also be altered to take into account the firing sequence of adjacent nozzles.
    Type: Grant
    Filed: June 17, 2003
    Date of Patent: August 15, 2006
    Assignee: Novellus Systems, Inc.
    Inventors: Henner W. Meinhold, Wayne Cai, Mark L. Rea, Sachin M. Chinchwadkar
  • Sensor for detecting droplet characteristics
    Patent number: 6764168
    Abstract: In one embodiment, a sensor includes two plates that form a capacitor. A droplet passing between the plates changes the capacitance of the sensor, thereby triggering an amplifier coupled to the sensor to generate an output signal. The output signal is indicative of droplet characteristics and may be used to calibrate a mechanism that dispensed the droplet.
    Type: Grant
    Filed: March 1, 2002
    Date of Patent: July 20, 2004
    Assignee: Novellus Systems, Inc.
    Inventors: Henner W. Meinhold, Mark L. Rea, Sachin M. Chinchwadkar, Fred J. Chetcuti, John S. Drewery