Patents by Inventor Sae Na NA

Sae Na NA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
    Publication number: 20240134289
    Abstract: A method includes detecting data associated with a patterning device and/or a lithographic apparatus, performing an action from a plurality of actions when a determination not to proceed is made, and performing the action on the patterning device and/or a lithographic apparatus.
    Type: Application
    Filed: February 3, 2022
    Publication date: April 25, 2024
    Applicants: ASML Netherlands B.V., ASML Holding N.V.
    Inventors: Bram Paul Theodoor VAN GOCH, Johan KUNNEN, Sae Na NA