Abstract: A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.

Abstract: Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.

Abstract: A flat-panel display (FPD) manufacturing apparatus is disclosed which not only includes a load lock chamber, a feeding chamber, and a processing chamber, at least one of which has a vertically-stacked chamber structure to achieve an enhancement in substrate processing efficiency, but also includes a temporary substrate storing space for temporarily storing substrates in the feeding chamber to reduce the time taken to feed substrates. Another FPD manufacturing apparatus is disclosed which includes a load lock chamber, a feeding chamber connected to the load lock chamber, a temporary substrate storing space arranged at a predetermined portion of the feeding chamber, and at least one processing chamber connected to the feeding chamber.

Abstract: An flat-panel display (FPD) manufacturing apparatus which has a configuration capable of easily processing large-size substrates while achieving easy manufacturing, transporting, operating, and repair processes.

Abstract: Disclosed herein is a flat panel display manufacturing apparatus that is capable of performing a predetermined process, such as deposition or etching on a substrate under vacuum. The flat panel display manufacturing apparatus comprises a pin supporting member disposed at the outside of the flat panel display manufacturing apparatus. The pin supporting member is connected to a plurality of lift pins, which lift a substrate from a lower substrate or put the substrate on the lower substrate, for driving the lift pins upward or downward at the same time. Consequently, the inside volume of the flat panel display manufacturing apparatus is decreased as compared to the conventional flat panel display manufacturing apparatus, and thus time for carrying out a pumping operation to apply high-vacuum to the inside of the flat panel display manufacturing apparatus is considerably reduced.