Patents by Inventor Sagnik Pal
Sagnik Pal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240077312Abstract: Systems and methods disclosed herein include a device with a bulk acoustic wave resonator and one or more trenches that are configured to impede the flow of acoustic energy to the bulk acoustic wave resonator.Type: ApplicationFiled: September 7, 2022Publication date: March 7, 2024Inventors: Diego EMILIO SERRANO, Sagnik PAL, Amir RAHAFROOZ, Thomas Kieran NUNAN, Ijaz JAFRI
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Patent number: 11614328Abstract: A sensing device includes an anchor having a central axis that defines a first radial direction and a second radial direction, and a resonant member flexibly supported by the anchor that includes a main body made of a single-crystal solid. The main body has a first material stiffness in the first radial direction and a second material stiffness in the second radial direction that is less than the first material stiffness. Moreover, the main body has a first component stiffness in the first radial direction and a second component stiffness in the second radial direction that is substantially similar to the first component stiffness. Another sensing device includes a resonant member having a main body that defines an aperture extending through the main body, and an electrode located in the aperture such that a capacitive channel is defined between the electrode and the main body that circumscribes the electrode.Type: GrantFiled: December 27, 2019Date of Patent: March 28, 2023Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Sagnik Pal, Diego Emilio Serrano, Thomas Kieran Nunan
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Publication number: 20220349712Abstract: A sensing device includes an anchor having a central axis that defines a first radial direction and a second radial direction, and a resonant member flexibly supported by the anchor that includes a main body made of a single-crystal solid. The main body has a first material stiffness in the first radial direction and a second material stiffness in the second radial direction that is less than the first material stiffness. Moreover, the main body has a first component stiffness in the first radial direction and a second component stiffness in the second radial direction that is substantially similar to the first component stiffness. Another sensing device includes a resonant member having a main body that defines an aperture extending through the main body, and an electrode located in the aperture such that a capacitive channel is defined between the electrode and the main body that circumscribes the electrode.Type: ApplicationFiled: December 27, 2019Publication date: November 3, 2022Inventors: Sagnik PAL, Diego Emilio SERRANO, Thomas Kieran NUNAN
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Publication number: 20220128359Abstract: A sensing device includes an anchor having a central axis that defines a first radial direction and a second radial direction, and a resonant member flexibly supported by the anchor that includes a main body made of a single-crystal solid. The main body has a first material stiffness in the first radial direction and a second material stiffness in the second radial direction that is less than the first material stiffness. Moreover, the main body has a first component stiffness in the first radial direction and a second component stiffness in the second radial direction that is substantially similar to the first component stiffness. Another sensing device includes a resonant member having a main body that defines an aperture extending through the main body, and an electrode located in the aperture such that a capacitive channel is defined between the electrode and the main body that circumscribes the electrode.Type: ApplicationFiled: December 27, 2019Publication date: April 28, 2022Inventors: Sagnik PAL, Diego Emilio SERRANO, Thomas Kieran NUNAN
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Patent number: 10887700Abstract: An acoustic apparatus includes a back plate, a diaphragm, and at least one pillar. The diaphragm and the back plate are disposed in spaced relation to each other. At least one pillar is configured to at least temporarily connect the back plate and the diaphragm across the distance. The diaphragm stiffness is increased as compared to a diaphragm stiffness in absence of the pillar. The at least one pillar provides a clamped boundary condition when the diaphragm is electrically biased and the clamped boundary is provided at locations where the diaphragm is supported by the at least one pillar.Type: GrantFiled: December 28, 2018Date of Patent: January 5, 2021Assignee: Knowles Electronics, LLCInventors: Sagnik Pal, Sung Bok Lee
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Patent number: 10433071Abstract: A microphone includes a base with a port extending therethrough, and a microelectromechanical system (MEMS) device coupled to the base. The MEMS device includes a diaphragm, a back plate, and a substrate. The substrate forms a back-hole. A capillary structure is disposed in the back-hole of the substrate, the cover, adjacent to the MEMS, or combinations thereof. The capillary structure includes a plurality of capillaries extending through the capillary structure. The capillary structure may have at least one hydrophobic surface and is configured to inhibit contaminants from outside the microphone from reaching the diaphragm via the port. In some embodiments, the capillary structure may protect against EMI.Type: GrantFiled: December 1, 2016Date of Patent: October 1, 2019Assignee: Knowles Electronics, LLCInventors: Sagnik Pal, Sung Bok Lee
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Publication number: 20190141451Abstract: An acoustic apparatus includes a back plate, a diaphragm, and at least one pillar. The diaphragm and the back plate are disposed in spaced relation to each other. At least one pillar is configured to at least temporarily connect the back plate and the diaphragm across the distance. The diaphragm stiffness is increased as compared to a diaphragm stiffness in absence of the pillar. The at least one pillar provides a clamped boundary condition when the diaphragm is electrically biased and the clamped boundary is provided at locations where the diaphragm is supported by the at least one pillar.Type: ApplicationFiled: December 28, 2018Publication date: May 9, 2019Applicant: Knowles Electronics, LLCInventors: Sagnik Pal, Sung Bok Lee
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Patent number: 10178478Abstract: An acoustic apparatus includes a back plate, a diaphragm, and at least one pillar. The diaphragm and the back plate are disposed in spaced relation to each other. At least one pillar is configured to at least temporarily connect the back plate and the diaphragm across the distance. The diaphragm stiffness is increased as compared to a diaphragm stiffness in absence of the pillar. The at least one pillar provides a clamped boundary condition when the diaphragm is electrically biased and the clamped boundary is provided at locations where the diaphragm is supported by the at least one pillar.Type: GrantFiled: August 21, 2017Date of Patent: January 8, 2019Assignee: Knowles Electronics, LLCInventors: Sagnik Pal, Sung Bok Lee
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Publication number: 20180376254Abstract: A microphone includes a base with a port extending therethrough, and a microelectromechanical system (MEMS) device coupled to the base. The MEMS device includes a diaphragm, a back plate, and a substrate. The substrate forms a back-hole. A capillary structure is disposed in the back-hole of the substrate, the cover, adjacent to the MEMS, or combinations thereof. The capillary structure includes a plurality of capillaries extending through the capillary structure. The capillary structure may have at least one hydrophobic surface and is configured to inhibit contaminants from outside the microphone from reaching the diaphragm via the port. In some embodiments, the capillary structure may protect against EMI.Type: ApplicationFiled: December 1, 2016Publication date: December 27, 2018Applicant: Knowles Electronics, LLCInventors: Sagnik PAL, Sung Bok LEE
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Publication number: 20170374469Abstract: An acoustic apparatus includes a back plate, a diaphragm, and at least one pillar. The diaphragm and the back plate are disposed in spaced relation to each other. At least one pillar is configured to at least temporarily connect the back plate and the diaphragm across the distance. The diaphragm stiffness is increased as compared to a diaphragm stiffness in absence of the pillar. The at least one pillar provides a clamped boundary condition when the diaphragm is electrically biased and the clamped boundary is provided at locations where the diaphragm is supported by the at least one pillar.Type: ApplicationFiled: August 21, 2017Publication date: December 28, 2017Applicant: Knowles Electronics, LLCInventors: Sagnik Pal, Sung Bok Lee
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Patent number: 9743191Abstract: An acoustic apparatus includes a back plate, a diaphragm, and at least one pillar. The diaphragm and the back plate are disposed in spaced relation to each other. At least one pillar is configured to at least temporarily connect the back plate and the diaphragm across the distance. The diaphragm stiffness is increased as compared to a diaphragm stiffness in absence of the pillar. The at least one pillar provides a clamped boundary condition when the diaphragm is electrically biased and the clamped boundary is provided at locations where the diaphragm is supported by the at least one pillar.Type: GrantFiled: October 2, 2015Date of Patent: August 22, 2017Assignee: Knowles Electronics, LLCInventors: Sagnik Pal, Sung Bok Lee
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Publication number: 20160105748Abstract: An acoustic apparatus includes a back plate, a diaphragm, and at least one pillar. The diaphragm and the back plate are disposed in spaced relation to each other. At least one pillar is configured to at least temporarily connect the back plate and the diaphragm across the distance. The diaphragm stiffness is increased as compared to a diaphragm stiffness in absence of the pillar. The at least one pillar provides a clamped boundary condition when the diaphragm is electrically biased and the clamped boundary is provided at locations where the diaphragm is supported by the at least one pillar.Type: ApplicationFiled: October 2, 2015Publication date: April 14, 2016Inventors: Sagnik Pal, Sung Bok Lee
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Publication number: 20160037263Abstract: A micro electro mechanical system (MEMS) microphone includes a base; a MEMS die disposed on the base; and a cover coupled to the base and enclosing the MEMS die. The MEMS die includes and diaphragm and back plate and posts extend from a first periphery of the back plate. The diaphragm is free to move within a boundary created by the posts. A front volume is formed on a first side of the diaphragm and a back volume is formed on a second side of the diaphragm between the diaphragm and the cover. A plurality of openings extend through the diaphragm about an outer periphery of the diaphragm, the openings being effective to mitigate noise.Type: ApplicationFiled: July 24, 2015Publication date: February 4, 2016Inventors: Sagnik Pal, Lance Barron, Sung Lee
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Patent number: 8735200Abstract: Embodiments of the invention provide robust electrothermal MEMS with fast thermal response. In one embodiment, an electrothermal bimorph actuator is fabricated using aluminum as one bimorph layer and tungsten as the second bimorph layer. The heating element can be the aluminum or the tungsten, or a combination of aluminum and tungsten, thereby providing a resistive heater and reducing deposition steps. Polyimide can be used for thermal isolation of the bimorph actuator and the substrate. For MEMS micromirror designs, the polyimide can also be used for thermal isolation between the bimorph actuator and the micromirror.Type: GrantFiled: December 6, 2011Date of Patent: May 27, 2014Inventors: Sagnik Pal, Huikai Xie
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Publication number: 20130067909Abstract: A curved multimorph actuator is provided composed of a plurality of materials, each material exhibiting different deformations in response to a stimulus, such as heat. Application of different stimuli causes the actuator to bend and/or twist. In an embodiment, the actuator is capable of rotating an object about its center without significantly shifting the center in one or more dimensions. In a further embodiment, the actuator can be used to rotate an object about a first axis and a second axis, wherein the first axis and the second axis are mutually perpendicular. In an embodiment, rotation about the first axis and the second axis are achieved in combination. In another embodiment, rotation about the first axis is produced in response to a first stimulus and rotation about the second axis is produced in response to a second stimulus.Type: ApplicationFiled: June 1, 2011Publication date: March 21, 2013Applicant: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.Inventors: Sagnik Pal, Huikai Xie, Karl R. Zawoy
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Publication number: 20120319226Abstract: Embodiments of the invention provide robust electrothermal MEMS with fast thermal response. In one embodiment, an electrothermal bimorph actuator is fabricated using aluminum as one bimorph layer and tungsten as the second bimorph layer. The heating element can be the aluminum or the tungsten, or a combination of aluminum and tungsten, thereby providing a resistive heater and reducing deposition steps. Polyimide can be used for thermal isolation of the bimorph actuator and the substrate. For MEMS micromirror designs, the polyimide can also be used for thermal isolation between the bimorph actuator and the micromirror.Type: ApplicationFiled: December 6, 2011Publication date: December 20, 2012Applicant: University of Florida Research Foundation, IncorporatedInventors: Sagnik Pal, Huikai Xie