Patents by Inventor Sakae Mamada

Sakae Mamada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Positioning device of table for semiconductor wafers
    Patent number: 5022619
    Abstract: A positioning device for a table on which a semiconductor wafer is moved into an inspection position is described. It comprises a pneumatic stage supporting the table and movable both in the x and y directions, a moving device using wire which moves the stage in the x or y direction, and a fine resolution lifting device which moves or lifts the table vertically.
    Type: Grant
    Filed: October 26, 1989
    Date of Patent: June 11, 1991
    Assignee: Tokyo Aircraft Instrument Co., Ltd.
    Inventor: Sakae Mamada