Patents by Inventor Samuel H. Stephenson

Samuel H. Stephenson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer etching, cleaning and stripping apparatus
    Patent number: 4982753
    Abstract: A wafer stripping, cleaning and etching apparatus includes a bowl, a table in the bowl carrying cassette of wafers, and a spray post with multiple fluid passages and ports directing fluid spray against the wafers.
    Type: Grant
    Filed: October 6, 1988
    Date of Patent: January 8, 1991
    Assignee: National Semiconductor Corporation
    Inventors: Thomas J. Grebinski, Jr., Samuel H. Stephenson