Abstract: Provided herein is an apparatus, comprising a first photon emitter configured to emit photons into an article from a circumferential edge of the article, and a photon detector array configured to detect photons scattered from features of the article.

Abstract: Provided herein is an apparatus, including a reflective surface configured to reflect photons onto a surface of an article, a stage configured to support the article, and an assembly. In some embodiments, the assembly configured to radiate photons through the article to the reflective surface. The assembly is further configured to image the article with irradiance of the photons.

Abstract: Provided herein is an apparatus, including a photon detector array configured to receive photons scattered from features in a surface of an article; and a characterization means for characterizing the features in the surface of the article, wherein the characterization means contrasts signals from the photon detector array corresponding to two sets of photons scattered from features in the surface of the article, and the two sets of photons respectively originate from photon emitters at different locations.

Abstract: A plating apparatus includes a vessel and a rack operable to be positioned inside the vessel. The rack includes a number of mandrels including a number of substrate mounting surfaces. The number of mandrels is non-revolving with respect to the rack. The rack further includes a number of gears coupled with the number of mandrels. A partition separates the number of gears from the number of mandrels. A diffuser is positioned below the rack. The diffuser is operable to produce a substantially uniform laminar flow of a fluid from a bottom to a top of the vessel. Thus, the laminar flow may reduce dead zones in the bath and remove defect-causing particles and gases away from the substrate.