Patents by Inventor Samuel Kurita

Samuel Kurita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Modular injector and exhaust assembly
    Publication number: 20050183825
    Abstract: An injector and exhaust assembly for providing delivery of gas to a substrate is provided. The injector and exhaust assembly comprises at least two injectors positioned adjacent each other and spaced apart to form at least one exhaust channel therebetween, and a mounting plate for securing the at least two injectors, wherein each of the at least two injectors being individually mounted to or removed from the mounting plate, and the mounting plate being provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. An exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors.
    Type: Application
    Filed: April 25, 2005
    Publication date: August 25, 2005
    Inventors: Jay DeDontney, Richard Matthiesen, Samuel Kurita
  • Modular injector and exhaust assembly
    Patent number: 6890386
    Abstract: An injector and exhaust assembly for providing delivery of gas to a substrate is provided. The injector and exhaust assembly comprises at least two injectors positioned adjacent each other and spaced apart to form at least one exhaust channel therebetween, and a mounting plate for securing the at least two injectors, wherein each of the at least two injectors being individually mounted to or removed from the mounting plate, and the mounting plate being provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. An exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors.
    Type: Grant
    Filed: July 12, 2002
    Date of Patent: May 10, 2005
    Assignee: Aviza Technology, Inc.
    Inventors: Jay Brian DeDontney, Richard H. Matthiesen, Samuel Kurita
  • Modular injector and exhaust assembly
    Publication number: 20030037729
    Abstract: An injector and exhaust assembly for providing delivery of gas to a substrate is provided. The injector and exhaust assembly comprises at least two injectors positioned adjacent each other and spaced apart to form at least one exhaust channel therebetween, and a mounting plate for securing the at least two injectors, wherein each of the at least two injectors being individually mounted to or removed from the mounting plate, and the mounting plate being provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. An exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors.
    Type: Application
    Filed: July 12, 2002
    Publication date: February 27, 2003
    Inventors: Jay Brian DeDontney, Richard H. Matthiesen, Samuel Kurita
  • Gas delivery metering tube
    Publication number: 20020134507
    Abstract: A gas delivery metering tube is provided. The gas delivery metering tube includes a two axially aligned nested tubes wherein the inner and outer tubes receive a gas through one end of the assembly and the inner tube conveys gas to the opposite end of the outer tube. The outer tube contains one or more arrays of orifices. Conveying gas to the end of the outer tube opposite that connected to the gas inlet provides for more even backing pressure over the entire length of the gas delivery metering tube than can be achieved by allowing gas to enter only through a single inlet.
    Type: Application
    Filed: July 13, 2001
    Publication date: September 26, 2002
    Applicant: Silicon Valley Group, Thermal Systems LLC
    Inventors: Jay Brian DeDontney, Anthony DeSa, Samuel Kurita