Patents by Inventor Sanbong Park

Sanbong Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • BBP assisted defect detection flow for SEM images
    Patent number: 11450012
    Abstract: A rendered image is aligned with a scanning electron microscope (SEM) image to produce an aligned rendered image. A reference image is aligned with the SEM image to produce an aligned reference image. A threshold probability map also is generated. Dynamic compensation of the SEM image and aligned reference image can produce a corrected SEM image and corrected reference image. A thresholded defect map can be generated and the defects of the thresholded probability map and the signal-to-noise-ratio defects of the thresholded defect map are filtered using a broadband-plasma-based property to produce defect-of-interest clusters.
    Type: Grant
    Filed: April 17, 2020
    Date of Patent: September 20, 2022
    Assignee: KLA Corporation
    Inventors: Santosh Bhattacharyya, Ge Cong, Sanbong Park, Boshi Huang
  • BBP Assisted Defect Detection Flow for SEM Images
    Publication number: 20210133989
    Abstract: A rendered image is aligned with a scanning electron microscope (SEM) image to produce an aligned rendered image. A reference image is aligned with the SEM image to produce an aligned reference image. A threshold probability map also is generated. Dynamic compensation of the SEM image and aligned reference image can produce a corrected SEM image and corrected reference image. A thresholded defect map can be generated and the defects of the thresholded probability map and the signal-to-noise-ratio defects of the thresholded defect map are filtered using a broadband-plasma-based property to produce defect-of-interest clusters.
    Type: Application
    Filed: April 17, 2020
    Publication date: May 6, 2021
    Inventors: Santosh Bhattacharyya, Ge Cong, Sanbong Park, Boshi Huang