Patents by Inventor Sandeep Madhogarhia

Sandeep Madhogarhia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Using absolute Z-height values for synergy between tools
    Patent number: 11600497
    Abstract: A semiconductor review tool receives absolute Z-height values for the semiconductor wafer, such as a semiconductor wafer with a beveled edge. The absolute Z-height values can be determined by a semiconductor inspection tool. The semiconductor review tool reviews the semiconductor wafer within a Z-height based on the absolute Z-height values. Focus can be adjusted to within the Z-height.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: March 7, 2023
    Assignee: KLA CORPORATION
    Inventors: Sandeep Madhogarhia, Hari Sriraman Pathangi, Rohit Bhat
  • USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS
    Publication number: 20200321221
    Abstract: A semiconductor review tool receives absolute Z-height values for the semiconductor wafer, such as a semiconductor wafer with a beveled edge. The absolute Z-height values can be determined by a semiconductor inspection tool. The semiconductor review tool reviews the semiconductor wafer within a Z-height based on the absolute Z-height values. Focus can be adjusted to within the Z-height.
    Type: Application
    Filed: March 31, 2020
    Publication date: October 8, 2020
    Inventors: Sandeep Madhogarhia, Hari Sriraman Pathangi, Rohit Bhat