Abstract: A method for controlling a plasma tool is described. The method includes receiving, by a processor, a first set of metric data from a plasma tool. The method further includes analyzing the first set of metric data to determine a first location and a first time window for capturing of a second set of metric data. The method includes providing, by the processor, the first location and the first time window to a data processing system of the plasma tool. The method also includes receiving the second set of metric data captured at the first location and for the first time window. The method includes analyzing the second set of metric data to generate variable data and controlling the plasma tool according to the variable data.

Abstract: Systems and methods for compressing data are described. One of the methods includes receiving a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool. The RF transmission path is from an output of an RF generator to an electrode of a plasma chamber. The method includes converting the plurality of measurement signals from an analog form to a digital form to sample data and processing the data to reduce an amount of the data. The amount of the data is compressed to output compressed data. The method includes sending the compressed data to a controller for controlling the plasma tool.

Abstract: An electrodeless plasma lamp is described that employs acoustic resonance. The plasma lamp includes a metal enclosure having a conductive boundary forming a resonant structure, and a radio frequency (RF) feed to couple RF power from an RF power source into the resonant cavity. A bulb is received at least partially within an opening in the metal enclosure. The bulb contains a fill that forms a light emitting plasma when the power is coupled to the fill. The RF power source includes a controller to modulate the RF power to induce acoustic resonance in the plasma.

Abstract: An electrodeless plasma lamp and a method of generating light are described. The lamp may comprise a lamp body including a dielectric material. The bulb is positioned proximate the lamp body and contains a fill that forms a plasma when radio frequency (RF) power is coupled to the fill. The conductive element is located within the lamp body and configured to enhance coupling of the RF power to the fill. The lamp may include a feed coupled to the RF power source and configured to radiate power into the lamp body. The at least one conductive element is configured to enhance the coupling of radiated power from the feed to the fill. In an example, two spaced apart conductive elements may be located within the lamp body. The bulb may be an elongated bulb having opposed ends, each opposed end of the bulb being proximate a corresponding conductive element.

Abstract: An electrodeless plasma lamp and a method of controlling operation of a plasma lamp are provided. The plasma lamp may a power source to provide radio frequency (RF) power and a lamp body to receive the RF power from a feed. The lamp body may comprise a dielectric material having a dielectric constant greater than 2 and bulb is provided that contains a fill that forms a plasma that emits light when at least a portion of the RF power is coupled to the fill. A light guide directs light from the bulb to a photosensor that is shielded from light output from a front side of the lamp body. The lamp includes a drive circuit to control operation of the lamp based on a level of light detected by the photosensor.

Abstract: A lamp and methods of forming are shown. In one example, a dielectric layer is formed over a gap between conductors in a plasma lamp. Electric arcing is reduced or eliminated, thus allowing tighter gaps and/or higher voltages. In one example a glass frit method is used to apply the dielectric layer. A lamp is shown with a barrier layer that prevents tarnish such as tarnish from sulfur exposure. The barrier layer reduces or prevents degradation of the lamp due to conversion of a conductor material to non-conductive tarnish material.

Abstract: The present disclosure relates to apparatuses and methods to control an electrodeless plasma light source. In various embodiments, an apparatus is provided that includes an electrodeless plasma lamp with a lamp driver circuit. The lamp driver circuit may include a voltage-controlled oscillator to provide radio frequency power to the electrodeless plasma lamp. A radio frequency power detector is coupled to an output of the voltage-controlled oscillator to detect a level of reflected power from the electrodeless plasma lamp. A microprocessor is configured to receive signals from the radio frequency power detector and control a frequency of the voltage-controlled oscillator to minimize the reflected power from the electrodeless plasma lamp.

Abstract: A lamp and methods of forming are shown. In one example, a dielectric layer is formed over a gap between conductors in a plasma lamp. Electric arcing is reduced or eliminated, thus allowing tighter gaps and/or higher voltages. In one example a glass frit method is used to apply the dielectric layer. A lamp is shown with a barrier layer that prevents tarnish such as tarnish from sulfur exposure. The barrier layer reduces or prevents degradation of the lamp due to conversion of a conductor material to non-conductive tarnish material.

Abstract: A plasma lamp is described with resonant frequency tuning capability and associated methods for tuning. One tuning method allows plasma lamp manufacturer to set the frequency of lamps to several discrete predetermined values. For example, most lamps that are near the center of a frequency distribution can be tuned to a nominal value such as 918.7 MHz. Other frequencies can also be tuned to increase manufacturing yield and improve lamp performance.

Abstract: In one example embodiment, a drive probe is coupled to the lamp body to provide the primary power for ignition and steady state operation of the lamp. Feedback may be used to adjust frequency in response to changing conditions of the lamp during startup. A phase shifter may be used to adjust the phase of the power between ignition and steady state operation. A sensor may detect a lamp operating condition that automatically triggers a shift in phase after the fill in the bulb is vaporized. In another example embodiment, a method for sequentially optimizing the drive power and phase shift applied to the lamp is disclosed that may reliably regulate the lamp current consumption to desired startup and operational levels despite variations in lamp environmental conditions.

Abstract: A lamp and methods of forming are shown. In one example, a dielectric layer is formed over a gap between conductors in a plasma lamp. Electric arcing is reduced or eliminated, thus allowing tighter gaps and/or higher voltages. In one example a glass frit method is used to apply the dielectric layer. A lamp is shown with a barrier layer that prevents tarnish such as tarnish from sulfur exposure. The barrier layer reduces or prevents degradation of the lamp due to conversion of a conductor material to non-conductive tarnish material.

Abstract: An electrodeless plasma lamp and a method of generating light are provided. The plasma lamp may comprise a power source to provide radio frequency (RF) power, and a bulb containing a fill that forms a plasma when the RF power is coupled to the fill. The plasma lamp further comprises a resonant structure having a quarter wave resonant mode. The resonant structure includes a lamp body comprising a dielectric material having a relative permittivity greater than 2, an inner conductor, and an outer conductor. The power source is configured to provide the RF power to the lamp body at about a resonant frequency for the resonant structure.

Abstract: An electrodeless plasma lamp and a method of controlling operation of a plasma lamp are provided. The plasma lamp may a power source to provide radio frequency (RF) power and a lamp body to receive the RF power from a feed. The lamp body may comprise a dielectric material having a dielectric constant greater than 2 and bulb is provided that contains a fill that forms a plasma that emits light when at least a portion of the RF power is coupled to the fill. A light guide directs light from the bulb to a photosensor that is shielded from light output from a front side of the lamp body. The lamp includes a drive circuit to control operation of the lamp based on a level of light detected by the photosensor.

Abstract: An electrodeless plasma lamp and a method of generating light are described. The lamp may comprise a lamp body including a dielectric material. The bulb is positioned proximate the lamp body and contains a fill that forms a plasma when radio frequency (RF) power is coupled to the fill. The conductive element is located within the lamp body and configured to enhance coupling of the RF power to the fill. The lamp may include a feed coupled to the RF power source and configured to radiate power into the lamp body. The at least one conductive element is configured to enhance the coupling of radiated power from the feed to the fill. In an example, two spaced apart conductive elements may be located within the lamp body. The bulb may be an elongated bulb having opposed ends, each opposed end of the bulb being proximate a corresponding conductive element.

Abstract: A lamp and methods of forming are shown. In one example, a dielectric layer is formed over a gap between conductors in a plasma lamp. Electric arcing is reduced or eliminated, thus allowing tighter gaps and/or higher voltages. In one example a glass frit method is used to apply the dielectric layer. A lamp is shown with a barrier layer that prevents tarnish such as tarnish from sulfur exposure. The barrier layer reduces or prevents degradation of the lamp due to conversion of a conductor material to non-conductive tarnish material.

Abstract: A plasma lamp is described with resonant frequency tuning capability and associated methods for tuning. One tuning method allows plasma lamp manufacturer to set the frequency of lamps to several discrete predetermined values. For example, most lamps that are near the center of a frequency distribution can be tuned to a nominal value such as 918.7 MHz. Other frequencies can also be tuned to increase manufacturing yield and improve lamp performance.