Patents by Inventor Sander Richard Marie Stoks
Sander Richard Marie Stoks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11024481Abstract: A scanning electron microscope. The scanning electron microscope may include a sliding vacuum seal between the electron optical imaging system and the sample carrier with a first plate having a first aperture associated with the electron optical imaging system and resting against a second plate having a second aperture associated with the sample carrier. The first plate and/or the second plate includes a groove circumscribing the first and/or second aperture. The scanning electron microscope may include a detector movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.Type: GrantFiled: August 31, 2020Date of Patent: June 1, 2021Assignee: FEI CompanyInventors: Karel Diederick Van Der Mast, Adrianus Franciscus Johannes Hammen, Wilhelmus Henrica Cornelis Theuws, Sander Richard Marie Stoks
-
Publication number: 20200402760Abstract: A scanning electron microscope. The scanning electron microscope may include a sliding vacuum seal between the electron optical imaging system and the sample carrier with a first plate having a first aperture associated with the electron optical imaging system and resting against a second plate having a second aperture associated with the sample carrier. The first plate and/or the second plate includes a groove circumscribing the first and/or second aperture. The scanning electron microscope may include a detector movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.Type: ApplicationFiled: August 31, 2020Publication date: December 24, 2020Inventors: Karel Diederick VAN DER MAST, Adrianus Franciscus Johannes HAMMEN, Wilhelmus Henrica Cornelis THEUWS, Sander Richard Marie STOKS
-
Patent number: 10796879Abstract: A scanning electron microscope (1) including a sliding vacuum seal (20) between an electron optical imaging system (2) and a sample carrier (10) with a first plate (22) having a first aperture (24) associated with the electron optical imaging system and resting against a second plate (26) having a second aperture (28) associated with the sample carrier. The first plate and/or the second plate includes a groove (40) circumscribing the first and/or second aperture. The scanning electron microscope may include a detector (8) movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.Type: GrantFiled: March 3, 2017Date of Patent: October 6, 2020Assignee: Phenom-World Holding B.V.Inventors: Karel Diederick Van Der Mast, Adrianus Franciscus Johannes Hammen, Wilhelmus Henrica Cornelis Theuws, Sander Richard Marie Stoks
-
Patent number: 10580613Abstract: Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.Type: GrantFiled: June 3, 2019Date of Patent: March 3, 2020Assignee: Phenom-World Holding B.V.Inventors: Gerhardus Bernardus Stamsnijder, Paul Cornelis Maria van den Bos, Ton Antonius Cornelis Henricus Kluijtmans, Sander Richard Marie Stoks, Adrianus Franciscus Johannes Hammen, Karel Diederick van der Mast
-
Publication number: 20190287756Abstract: Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.Type: ApplicationFiled: June 3, 2019Publication date: September 19, 2019Applicant: Phenom-World Holding B.V.Inventors: Gerhardus Bernardus Stamsnijder, Paul Cornelis Maria van den Bos, Ton Antonius Cornelis Henricus Kluijtmans, Sander Richard Marie Stoks, Adrianus Franciscus Johannes Hammen, Karel Diederick van der Mast
-
Publication number: 20190103245Abstract: A scanning electron microscope (1) including a sliding vacuum seal (20) between an electron optical imaging system (2) and a sample carrier (10) with a first plate (22) having a first aperture (24) associated with the electron optical imaging system and resting against a second plate (26) having a second aperture (28) associated with the sample carrier. The first plate and/or the second plate includes a groove (40) circumscribing the first and/or second aperture. The scanning electron microscope may include a detector (8) movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.Type: ApplicationFiled: March 3, 2017Publication date: April 4, 2019Inventors: Karel Diederick VAN DER MAST, Adrianus Franciscus Johannes HAMMEN, Wilhelmus Henrica Cornelis; THEUWS, Sander Richard Marie STOKS
-
Patent number: 9865427Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.Type: GrantFiled: May 5, 2015Date of Patent: January 9, 2018Assignee: FEI CompanyInventors: Martinus Petrus Maria Bierhoff, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Steven Berger, Ben Jacobus Marie Bormans, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus W. G. Persoon
-
Publication number: 20170316913Abstract: Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.Type: ApplicationFiled: November 11, 2015Publication date: November 2, 2017Inventors: Gerhardus Bernardus Stamsnijder, Paul Cornelis Maria van den Bos, Ton Antonius Cornelis Henricus Kluijtmans, Sander Richard Marie Stoks, Adrianus Franciscus Johannes Hammen, Karel Diederick van der Mast
-
Publication number: 20150332891Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.Type: ApplicationFiled: May 5, 2015Publication date: November 19, 2015Applicant: FEI COMPANYInventors: MART PETRUS MARIA BIERHOFF, BART BUIJSSE, CORNELIS SANDER KOOIJMAN, HUGO VAN LEEUWEN, HENDRIK GEZINUS TAPPEL, COLIN AUGUST SANFORD, SANDER RICHARD MARIE STOKS, STEVEN BERGER, BEN JACOBUS MARIE BORMANS, KOEN ARNOLDUS WILHELMUS DRIESSEN, JOHANNES ANTONIUS HENDRICUS W. G. PERSOON
-
Patent number: 9025018Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.Type: GrantFiled: June 7, 2007Date of Patent: May 5, 2015Assignee: FEI CompanyInventors: Martinus Petrus Maria Bierhoff, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Steven Berger, Ben Jacobus Marie Bormans, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus W.G. Persoon
-
Patent number: 8748816Abstract: Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.Type: GrantFiled: July 11, 2012Date of Patent: June 10, 2014Assignee: FEI CompanyInventors: Cornelis Sander Kooijman, Sander Richard Marie Stoks
-
Patent number: 8653457Abstract: A method of examining a sample using a spectroscopic apparatus, comprising the following steps: Mounting the sample on a sample holder; Directing a focused input beam of radiation onto a location on the sample, thereby producing an interaction that causes a flux of stimulated photonic radiation to emanate from said location; Examining said flux using a multi-channel photon-counting detector, thus accruing a measured spectrum for said location; Automatically repeating said directing and examining steps for a series of successive locations on the sample, which method comprises the following steps: Choosing a beam parameter of the input beam that will influence a magnitude of said flux of stimulated photonic radiation; For each location within a first set of locations on the sample, accruing a spectrum using a first value of said beam parameter; For each location within a second set of locations on the sample, accruing a spectrum using a second value of said beam parameter, different from said first value.Type: GrantFiled: July 19, 2013Date of Patent: February 18, 2014Assignee: FEI CompanyInventor: Sander Richard Marie Stoks
-
Publication number: 20140021346Abstract: A method of examining a sample comprises mounting the sample on a sample holder; directing a beam of radiation onto a location on the sample, thereby causing a flux of stimulated photonic radiation to emanate from said location; examining said flux using a multi-channel photon-counting detector, thus accruing a measured spectrum for said location; automatically repeating said directing and examining steps for a series of successive locations, the method of which comprises choosing a beam parameter of the input beam that will influence a magnitude of said flux of stimulated photonic radiation; for each location within a first set of locations on the sample, accruing a spectrum using a first value of said beam parameter; for each location within a second set of locations on the sample, accruing a spectrum using a second value of said beam parameter.Type: ApplicationFiled: July 19, 2013Publication date: January 23, 2014Applicant: FEI CompanyInventor: Sander Richard Marie Stoks
-
Publication number: 20130015351Abstract: Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.Type: ApplicationFiled: July 11, 2012Publication date: January 17, 2013Applicant: FEI CompanyInventors: Cornelis Sander Kooijman, Sander Richard Marie Stoks
-
Patent number: 8309921Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.Type: GrantFiled: February 1, 2011Date of Patent: November 13, 2012Assignee: FEI CompanyInventors: Martinus Petrus Maria Bierhoff, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Steven Berger, Ben Jacobus Marie Bormans, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus W. G. Persoon
-
Publication number: 20110133083Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.Type: ApplicationFiled: February 1, 2011Publication date: June 9, 2011Applicant: FEI COMPANYInventors: MART PETRUS MARIA BIERHOFF, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Ben Jacobus Marie Bormans, Steven Berger, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus WILHELMUS Gerardus Persoon
-
Patent number: 7906762Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.Type: GrantFiled: June 7, 2007Date of Patent: March 15, 2011Assignee: FEI CompanyInventors: Mart Petrus Maria Bierhoff, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Ben Jacobus Marie Bormans, Steven Berger, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus Wilhelmus Gerardus Persoon
-
Publication number: 20100230590Abstract: A compact electron microscope is robust, simple to operate, and preferably requires no special utilities. Imaging can begin shortly after a sample is inserted. A preferred simplified design includes permanent magnets for focusing, lack a vacuum controller and vacuum gauge, and uses a backscattered electron detector and no secondary electron detector.Type: ApplicationFiled: June 7, 2007Publication date: September 16, 2010Applicant: FEI COMPANYInventors: Mart Petrus Maria Bierhoff, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Steven Berger, Ben Jacobus Marie Bormans, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus W. G. Persoon
-
Publication number: 20100171037Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.Type: ApplicationFiled: June 7, 2007Publication date: July 8, 2010Applicant: FEI COMPANYInventors: Mart Petrus Maria Bierhoff, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Steven Berger, Ben Jacobus Marie Bormans, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus W. G. Persoon