Abstract: An infrared bolometer having enhanced structural integrity includes an active matrix level having a substrate and a pair of connecting terminals, a support level provided with a pair of bridges and a pair of conduction lines, an absorption level including a bolometer clement surrounded by an absorber and a pair of posts positioned between the support level and the absorption level. Each of bridges is provided with an anchor portion, a leg portion and an elevated portion, the anchor portion being affixed to the active matrix level and the elevated portion being apart from the active matrix level, wherein the elevated portion of each of the bridges including an inner part cantilevered from an outer part. Each of the posts includes an electrical conduit, wherein each ends of the bolometer element is electrically connected to the respective connecting terminal through the respective conduit and the respective conduction line.

Abstract: An inventive infrared bolometer includes an active matrix level having a substrate provided with an integrated circuit, a pair of connecting terminals and a protective layer, a support level having a bridge and a pair of conduction lines formed on top of the bridge, wherein the bridge includes a pair of anchor portion, a pair of leg portions and an elevated portion, an absorption level having a bolometer element surrounded by an absorber, a reflective layer located at bottom of the absorber and an IR absorber coating placed on top of the absorber, and a pair of posts placed between the absorption level and the support level, wherein a top portion of each of the posts is attached on the center portion of the absorber and a bottom portion thereof is attached on the elevated portion of the bridge. The absorption level is formed with a groove along and near its edge so as to prevent stresses accumulated in absorption level from being relieved.

Abstract: A infra-red bolometer includes an active matrix level, a support level, a pair of posts and an absorption level. The active matrix level includes a substrate having a pair of connecting terminals. The support level includes a pair of bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes a serpentine bolometer element surrounded by an absorber and a serpentine stress balancing member formed at bottom of the absorber. The serpentine stress balancing member has an identical shape, a same material and rotated 90° with respect to the serpentine bolometer element to make the compressive stress in the absorber evenly distributed, preventing the absorber from being bent to thereby allow the bolometer to ensure an optimum absorption efficiency.

Abstract: A three-level infra-red bolometer includes an active matrix level, a support level, a pair of posts and an absorption level. The active matrix level includes a substrate having an integrated circuit, a pair of connecting terminals and a protective layer covering the substrate. The support level includes a pair of bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes a serpentine bolometer element surrounded by an absorber made of silicon oxide (SiO2) or silicon oxy-nitride (SiOxNy). Each of the posts includes an electrical conduit surrounded by an insulating material and is placed between the absorption level and the bridge, in such a way that the serpentine bolometer element is electrically connected to the integrated circuit through the electrical conduit, the conduction line and the connecting terminal.