Abstract: Disclosed is a substrate treating apparatus including a chamber having a process space therein in which a substrate is treated, a substrate support assembly located in the chamber and including a support plate that supports the substrate, a gas supply unit that supplies gas into the chamber, a gas distribution plate that distributes the gas and supplies the gas into the process space, and a temperature control unit that controls temperature of the gas distribution plate. The temperature control unit includes a heating member that heats the gas distribution plate, a cooling member that cools the gas distribution plate, and a control member that controls the heating member and the cooling member, based on a correlation coefficient regarding an interaction of the heating member and the cooling member and a disturbance coefficient regarding an external influence.

Abstract: Disclosed is a substrate treating apparatus including a chamber having a process space therein in which a substrate is treated, a substrate support assembly located in the chamber and including a support plate that supports the substrate, a gas supply unit that supplies gas into the chamber, a gas distribution plate that distributes the gas and supplies the gas into the process space, and a temperature control unit that controls temperature of the gas distribution plate. The temperature control unit includes a heating member that heats the gas distribution plate, a cooling member that cools the gas distribution plate, and a control member that controls the heating member and the cooling member, based on a correlation coefficient regarding an interaction of the heating member and the cooling member and a disturbance coefficient regarding an external influence.

Abstract: An apparatus includes voice coil motor (VCM) control circuitry and microactuator control circuitry. The VCM control circuitry includes a VCM disturbance observer configured to generate a VCM disturbance compensation signal. The microactuator control circuitry includes a microactuator disturbance observer configured to generate a microactuator disturbance compensation signal. The VCM disturbance observer and the microactuator disturbance observer are decoupled from each other.

Abstract: An apparatus includes voice coil motor (VCM) control circuitry and microactuator control circuitry. The VCM control circuitry includes a VCM disturbance observer configured to generate a VCM disturbance compensation signal. The microactuator control circuitry includes a microactuator disturbance observer configured to generate a microactuator disturbance compensation signal. The VCM disturbance observer and the microactuator disturbance observer are decoupled from each other.

Abstract: Disturbance rejection in a closed loop multi-actuator system. In some embodiments, a first disturbance observer (DOB) circuit is configured to inject a first disturbance rejection signal into an input control signal of a first stage of a multi-stage actuator. A second DOB circuit is configured to concurrently inject a second disturbance rejection signal into an input control signal of a second stage of the multi-stage actuator. Each of the first and second DOB circuits includes a band pass filter and an energy reducing filter. In some embodiments, the energy reducing filter has at least one notch filter and at least one anti-notch filter. In other embodiments, the energy reducing filter is a low-pass filter (LPF).

Abstract: Disturbance rejection in a closed loop multi-actuator system. In some embodiments, a first disturbance observer (DOB) circuit is configured to inject a first disturbance rejection signal into an input control signal of a first stage of a multi-stage actuator. A second DOB circuit is configured to concurrently inject a second disturbance rejection signal into an input control signal of a second stage of the multi-stage actuator. Each of the first and second DOB circuits includes a band pass filter and an energy reducing filter. In some embodiments, the energy reducing filter has at least one notch filter and at least one anti-notch filter. In other embodiments, the energy reducing filter is a low-pass filter (LPF).

Abstract: First and second controllers output respective first and second control signals for first and second plants that respectively correspond to the stages of an actuator. An inverse model of the first plant used to determine a decoupled output of the second plant from a combined output of the first and second plants. A disturbance estimate is subtracted from the second control signal to obtain a disturbance-corrected output. A loop-shaping filter is used between the disturbance corrected output and the second plant.