Abstract: An image acquiring method for acquiring an image using a measurement apparatus including an image acquiring means which acquires an image of a surface of a target to be measured in the unit of predetermined size pixels and a moving means capable of moving the target to be measured, the image acquiring method includes: acquiring an image of a first region from the surface of the target to be measured through the image acquiring means; acquiring an image of a second region, which is different from the first region, by moving the target to be measured, through the moving means; acquiring a differential image by subtracting, from either the image of the first region or the image of the second region, the other image; and overlapping the differential image multiple times.

Abstract: Provided are a head having improved usability by limiting a movement range of a laser spot and an atomic force microscope having the same. A head according to an exemplary embodiment of the present disclosure is a head measuring bending of a cantilever by using a laser beam reflected on the surface of the cantilever in order to acquire information on a sample surface by using a tip of the cantilever. The head includes: a spot moving means configured to move a laser spot so as to position the laser spot on the surface of the cantilever; and a movement limiting means configured to limit a movement range of the laser spot moved by the spot moving means in a predetermined range.

Abstract: A measurement method in which a sensing unit acquires surface data of a measurement target while scanning the surface of the measurement target and at least one of the sensing unit and the measurement target is moved in order for the sensing unit to scan the surface along a plurality of fast scan lines on the surface of the measurement target, includes: a first step in which the sensing unit scans a surface along any one fast scan line of the plurality of fast scan lines to acquire the surface data along the any one fast scan line; and a second step in which the sensing unit acquires a surface data along a fast scan line most adjacent to the any one fast scan line while at least one of the sensing unit and the measurement target is moved along the most adjacent fast scan line, after the first step.

Abstract: A measurement method in which a sensing unit acquires surface data of a measurement target while scanning the surface of the measurement target and at least one of the sensing unit and the measurement target is moved in order for the sensing unit to scan the surface along a plurality of fast scan lines on the surface of the measurement target, includes: a first step in which the sensing unit scans a surface along any one fast scan line of the plurality of fast scan lines to acquire the surface data along the any one fast scan line; and a second step in which the sensing unit acquires a surface data along a fast scan line most adjacent to the any one fast scan line while at least one of the sensing unit and the measurement target is moved along the most adjacent fast scan line, after the first step.

Abstract: Provided are a head having improved usability by limiting a movement range of a laser spot and an atomic force microscope having the same. A head according to an exemplary embodiment of the present disclosure is a head measuring bending of a cantilever by using a laser beam reflected on the surface of the cantilever in order to acquire information on a sample surface by using a tip of the cantilever. The head includes: a spot moving means configured to move a laser spot so as to position the laser spot on the surface of the cantilever; and a movement limiting means configured to limit a movement range of the laser spot moved by the spot moving means in a predetermined range.

Abstract: An image acquiring method for acquiring an image using a measurement apparatus including an image acquiring means which acquires an image of a surface of a target to be measured in the unit of predetermined size pixels and a moving means capable of moving the target to be measured, the image acquiring method includes: acquiring an image of a first region from the surface of the target to be measured through the image acquiring means; acquiring an image of a second region, which is different from the first region, by moving the target to be measured, through the moving means; acquiring a differential image by subtracting, from either the image of the first region or the image of the second region, the other image; and overlapping the differential image multiple times.

Abstract: A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls.

Abstract: A scanning probe microscope images a surface of a sample by scanning the sample along a forward path while collecting data for imaging the surface of the sample, recording an uppermost position of the probe while the sample is scanning along the forward path, and scanning the sample along a return path while the probe is positioned higher than the uppermost position of the probe. The return scanning speed is configured to be higher than the forward scanning speed so that the surface image can be obtained rapidly. Also, the return path tracks the forward path until the beginning of the forward path is reached. In this manner, positioning errors caused by hysteresis in the scanning system can be eliminated.

Abstract: A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls.

Abstract: Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.

Abstract: A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide and has grooves that engage with corresponding projections on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide.

Abstract: Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.