Patents by Inventor Satayadev R. Patel

Satayadev R. Patel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
    Patent number: 7307775
    Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.
    Type: Grant
    Filed: June 11, 2002
    Date of Patent: December 11, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Satayadev R. Patel, Andrew G. Huibers, Steve Chiang, Robert M. Duboc, Thomas J. Grobelny, Hung Nan Chen, Dietrich Dehlinger, Peter W. Richards, Hongqin Shi, Anthony Sun