Abstract: An improved process and system for treating a solution of a solute which can be concentrated by forcing a portion of the solvent through a semi-permeable membrane and converted to the solid phase by increasing the concentration of the solute in the solution. A phase conversion device receives the solution and converts a portion of the solute to the solid phase. The resulting mixture is passed through a separation device such as a filter to remove the solids from the remaining solution. A concentration device such as a reverse osmosis, electrodialysis or ultrafiltration device treats the resultant solution discharging a permeate of solvent essentially free of solute and a concentrate enriched in solute. A recycle line recycles the concentrate to the phase conversion device to advance precipitation of the solute by driving the solubility equilibrium toward precipitation.

Abstract: A broad band catadioptric optical reduction system using refractive elements made of different types of glass matched for color correction over a broad band width. A combination of fused silica and crown glass is used. An aspheric mirror is used for improved aberration correction. The optical system is adapted for use in lithography for semiconductor manufacturing in the I-line and is capable of 0.5 micron resolution at a wavelength of 365 nanometers.