Abstract: A an apparatus for locking a bending mechanism that bends a reflex type wavelength selection element for a bending mechanism that bends a reflex type wavelength selection element comprises a locking assembly. The locking assembly locks the bending mechanism. This allows maintaining the configuration of the reflex type wavelength selection element with the element being bent by the bending mechanism according to curvature of wavefront of an incident laser beam. Therefore, it is possible to stabilize the performance of wavelength selection in the reflex type wavelength selection element, even though the laser device receives vibration and shock.

Abstract: A wavelength control device for a laser device capable of controlling a center wavelength of a laser light to be a predetermined target wavelength is provided. For this purpose, the wavelength control device for the laser device includes a movable holder (36) for making an optical component (34) movable with respect to a laser optical axis (20), and a laser controller (13) for moving the optical component with respect to the laser optical axis and changing an incident angle (&phgr;) of a laser light (21) on a band narrowing optical component (33) to thereby control a center wavelength of the laser light to be a predetermined target wavelength, and the movable holder comprises a piezoelectric element unit (41) moving by a very short distance and a pulse motor unit (40) moving by a longer distance than the piezoelectric element unit.

Abstract: In a laser apparatus, precision of wavelength control, wavelength stability and speed of wavelength control are increased, and an optical component is prevented from being polluted. A ball screw is used a feed screw of a feed screw mechanism that changes the orientation angle of the optical component.

Abstract: A an apparatus for locking a bending mechanism that bends a reflex type wavelength selection element for a bending mechanism that bends a reflex type wavelength selection element comprises a locking assembly. The locking assembly locks the bending mechanism. This allows maintaining the configuration of the reflex type wavelength selection element with the element being bent by the bending mechanism according to curvature of wavefront of an incident laser beam. Therefore, it is possible to stabilize the performance of wavelength selection in the reflex type wavelength selection element, even though the laser device receives vibration and shock.

Abstract: A wavelength control device for a laser device capable of controlling a center wavelength of a laser light to be a predetermined target wavelength is provided. For this purpose, the wavelength control device for the laser device includes a movable holder (36) for making an optical component (34) movable with respect to a laser optical axis (20), and a laser controller (13) for moving the optical component with respect to the laser optical axis and changing an incident angle (&phgr;) of a laser light (21) on a band narrowing optical component (33) to thereby control a center wavelength of the laser light to be a predetermined target wavelength, and the movable holder comprises a piezoelectric element unit (41) moving by a very short distance and a pulse motor unit (40) moving by a longer distance than the piezoelectric element unit.