Abstract: A plasma reactor has a cylindrical microwave cavity overlying a workpiece processing chamber, a microwave source having a pair of microwave source outputs, and a pair of respective waveguides. The cavity has first and second input ports in a sidewall and space apart by an azimuthal angle. Each of the waveguides has a microwave input end coupled to a microwave source output and a microwave output end coupled to a respective one of the first and second input ports, a coupling aperture plate at the output end with a rectangular coupling aperture in the coupling aperture plate, and an iris plate between the coupling aperture plate and the microwave input end with a rectangular iris opening in the iris plate.

Abstract: A method for applying a powder or granule, wherein the powder or granule is continuously pulled out, by a screw feeder, from a supply unit for temporarily storing the powder or granule, the pulled-out powder or granule is allowed to fall to be received in a vibrating conveyor unit, the powder or granule is conveyed while being dispersed by vibration of a vibrating element of the vibrating conveyor unit, and the powder or granule is continuously applied on the base material from a sprinkling outlet of the vibrating conveyor unit; an application device used for the same; and a method for manufacturing a heat generating element using the same.