Abstract: A physical quantity sensor includes a substrate, and a moving member facing the substrate in a third direction via a gap and becoming displaced in the third direction in relation to the substrate. The moving member has a first part and a second part, and a plurality of penetration holes arranged at the first part and the second part and penetrating the moving member in the third direction. In at least one of a first area overlapping the first part and a second area overlapping the second part, as viewed in a plan view from the third direction, C?1.5×Cmin is satisfied, where C is a damping and Cmin is a minimum value of the damping.

Abstract: A superordinate controlling device for a heat source system (1) including a plurality of heat sources, the superordinate controlling device being applied to the heat source system (1) and controlling heat-pump type chillers (2a) and (2b) and absorption-type chillers (2c) and (2d) in such a manner that a heat transfer medium leaving temperature that is the temperature of a heat transfer medium supplied to an external load (6) is equal to a setting temperature. The heat-pump type chillers (2a) and (2b) each have a higher Coefficient of Performance (COP) than that of each of the absorption-type chillers (2c) and (2d).

Abstract: A physical quantity sensor includes a substrate and a movable body. A first region to an n-th region in which a step is provided between adjacent regions are provided on a first surface of a first mass portion of the movable body. Ends of the first region to the n-th region on a side far from the rotation axis are referred to as a first end to an n-th end.

Abstract: A display device control apparatus is provided to control a display device provided on an instrument panel of a vehicle. The display device control apparatus acquires a state of the vehicle, and sets an inclination of a display screen unit included in the display device according to the state of the vehicle.

Abstract: In an image provision apparatus (100), a decomposition unit (111) decomposes image data into pieces of unit image data (70). A storing unit (112) stores, in a memory unit (130), image management information (131) including each piece of unit image data (70) of the pieces of unit image data and position information. An acquisition unit (121) accepts a provision request (52). The provision request (52) includes range information representing a range of a partial image in the image. The acquisition unit (121) acquires a unit image data set (711) representing unit images each including at least part of the partial image from the image management information (131), based on the range information and the position information. A generation unit (122) generates the partial image (63) based on the unit image data set (711).

Abstract: A physical quantity sensor includes a substrate that has a first fixed electrode and a movable body that has a first mass portion facing the first fixed electrode. The first mass portion includes a first region, and a second region farther from the rotation axis than the first region, a first through-hole group is provided in the first region, and a second through-hole group is provided in the second region, and the movable body has a first surface on a substrate side, and a second surface. The first surface of the first mass portion is provided with a step or a slope such that a first gap distance of a first gap between the first mass portion and the first fixed electrode in the first region is smaller than a second gap distance of a second gap between the first mass portion and the first fixed electrode in the second region. A depth of through-holes of the first through-hole group and the second through-hole group is smaller than a maximum thickness of the movable body.

Abstract: A substrate processing apparatus configured to dry a substrate with a processing fluid in a supercritical state includes: a processing vessel; a substrate holder configured to hold the substrate horizontally within the processing vessel; a first supply line connected to a first fluid supply provided at the processing vessel and configured to supply the processing fluid into the processing vessel; a drain line connected to a drain unit provided at the processing vessel and configured to drain the processing fluid from the processing vessel; a bypass line branched off from the first supply line and connected to the drain line, the bypass line being configured to allow at least a part of the processing fluid flowing in the first supply line to be drained into the drain line without passing through the processing vessel; and a bypass opening/closing valve configured to open or close the bypass line.

Abstract: A physical quantity sensor includes a movable body, a support portion supporting the movable body through a connecting portion, and a substrate that is disposed so as to overlap the movable body in plan view and provided with a first fixed electrode and a second fixed electrode along a first direction orthogonal to a longitudinal direction of the connecting portion. In plan view, a dummy electrode that is disposed next to the first fixed electrode and is at the same potential as the movable body is provided on the substrate. The first fixed electrode and the dummy electrode includes a first electrode material layer provided on the substrate, and a second electrode material layer provided on the substrate and on the first electrode material layer.

Abstract: A control device for a vehicle comprises a projected driving route calculating part calculating a projected driving route up to a destination, a target charge amount setting part setting a target amount of charge of the battery at each point on the projected driving route, an operating schedule setting part setting the operating schedule of the internal combustion engine and rotary electrical machine so that the amount of charge of the battery becomes the target amount of charge, and an operating schedule resetting part resetting an operating schedule when the difference between the amount of charge of the battery and the target amount of charge becomes a reset request value or more. The operating schedule resetting part is configured so as to reduce the reset request value when the remaining distance on the projected driving route is short compared to when it is long.

Abstract: An inertial sensor includes: a substrate; a moving element swinging about a swing axis along a Y-axis; a detection electrode provided at the substrate, overlapping the moving element as viewed in a plan view from a Z-axis direction orthogonal to the Y-axis, and forming an electrostatic capacitance with the moving element; an exposure part provided at an inner side of the detection electrode and exposing a surface facing the moving element, of the substrate; a protrusion overlapping the moving element as viewed in a plan view from the Z-axis direction and protruding toward the moving element from the exposure part of the substrate; and a covered electrode provided at a top of the protrusion and having a same electric potential as the moving element.

Abstract: A sintered Ni ferrite body having a composition comprising, calculated as oxide, 47.0-48.3% by mol of Fe2O3, 14.5% or more and less than 25% by mol of ZnO, 8.2-10.0% by mol of CuO, and more than 0.6% and 2.5% or less by mol of CoO, the balance being NiO and inevitable impurities, and having an average crystal grain size of more than 2.5 ?m and less than 5.5 ?m.

Abstract: An inertial sensor includes: a substrate; a fixing part arranged at one surface of the substrate; a moving element having an opening and configured to swing about a rotation axis along a first direction; a support beam supporting the moving element as the rotation axis in the opening of the moving element; and a support part supporting the support beam. The support part includes a first part fixed to the fixing part, and a second part formed only of a part not fixed to the fixing part. A length in the first direction of the second part is longer than a length in the first direction of the first part.

Abstract: In an inertial sensor, a first movable body configured to swing around a first rotation axisrotation axis along a first direction has an opening; the opening includes a second movable body configured to swing around a second rotation axisrotation axis along a second direction, a second support beam supporting the second movable body as the second rotation axisrotation axis, a third movable body configured to swing around a third rotation axisrotation axis along the second direction, and a third support beam supporting the third movable body as the third rotation axisrotation axis; and a protrusion is provided at a surface facing the second movable body and the third movable body, or at the second movable body and the third movable body, the protrusion protruding toward the second movable body and the third movable body or the surface.

Abstract: A semiconductor light emitting device includes a light extraction layer having a light extraction surface. Multiple cone-shaped parts formed in an array are provided on the light extraction surface. The cone-shaped part has a first portion having a first angle of inclination of a side surface and a second portion having a second angle of inclination of a side surface smaller than the first angle. The second portion is closer to an apex of the cone-shaped part than the first portion and has a larger height than the first portion.

Abstract: An inertial sensor includes a substrate, a first supporting beam being a first rotation axis extending along a first direction, a first movable member swingable around the first rotation axis, a second supporting beam being a second rotation axis extending along a second direction crossing the first direction, a second movable member swingable around the second rotation axis, a third rotation axis extending along a second direction, a third movable member swingable around the third rotation axis, and a projection, wherein the second and third movable members are line-symmetrically placed with a center line of the first movable member along the second direction as an axis of symmetry, a center of gravity of the second movable member is closer to the center line than the second supporting beam, and a center of gravity of the third movable member is closer to the center line than the third supporting beam.

Abstract: A vehicle drive device includes an electric motor disposed in a wheel, a planetary gear mechanism, and a hub. The electric motor is configured to generate a drive force which drives the wheel. The drive force of the electric motor is transmitted to the planetary gear mechanism. The hub transmits a drive force of the planetary gear mechanism to the wheel. The planetary gear mechanism includes a pinion gear having a first pinion and a second pinion coaxial with the first pinion and having a smaller diameter than the first pinion, a fixed ring gear which engages with the first pinion, and a drive ring gear which engages with the second pinion and transmits a drive force to the hub. The first pinion is disposed at a position away from an end portion of the stator core in a direction in which a rotation center axis of the wheel extends.

Abstract: A physical quantity sensor includes a movable body that includes a beam portion, a coupling portion that is connected with the beam portion at connection positions and is provided in a direction intersecting with the beam portion, and a first and second mass portions that are connected with the coupling portion; a first and second fixed electrodes that are provided on a support substrate and are opposed to the first and second mass portions; and a protrusion is provided and protrude from the support substrate toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions opposite to the beam portion is L, and a distance from the protrusions to end portions opposite to the beam portion is L1, the distance L1 is 0.18 L or longer and 0.88 L or shorter.

Abstract: A physical quantity sensor includes a substrate, a support portion fixed to the substrate, a movable body which is displaceable in a first direction with respect to the support portion and has a movable electrode provided therein, and a fixed electrode fixed to the substrate. The fixed electrode includes first and second fixed electrode fingers positioned on one side of the support portion, third and fourth fixed electrode fingers positioned on the other side thereof. The movable electrode includes first to fourth movable electrode fingers which face the first to fourth fixed electrode fingers in the first direction, respectively.

Abstract: A substrate processing method capable of suppressing particles from remaining on a surface of a substrate is provided. In the substrate processing method, a liquid film of a protection liquid is formed on the surface of the substrate, and the substrate is dried by using a supercritical fluid so that the protection liquid is removed from the surface of the substrate. After the substrate is dried, the particles remaining on the surface of the substrate is removed.

Abstract: A forming method of forming a micropattern which has a direction and a position controlled for each predetermined position on an object subjected to pattern formation, and an imprinting mold producing method, an imprinting mold and an optical device to which such a forming method is applied.