Abstract: An industrial compact synchrotron radiation source includes, for the purpose of prolonging lifetime of a charged particle beam, beam absorbers made of a material having a low photodesorption yield and disposed inside a bending section/vacuum chamber at at least positions upon which the synchrotron radiation is irradiated, and electrically conductive beam stabilizers disposed at positions inside the bending section/vacuum chamber which are distant by a predetermined distance from an orbit of the charged particle beam toward the outer circumferential wall of the bending section/vacuum chamber.

Abstract: An industrial compact synchrotron radiation source includes, for the purpose of prolonging lifetime of a charged particle beam, beam absorbers made of a material having a low photodesorption yield and disposed inside a bending section/vacuum chamber at at least positions upon which the synchrotron radiation is irradiated, and electrically conductive beam stabilizers disposed at positions inside the bending section/vacuum chamber which are distant by a predetermined distance from an orbit of the charged particle beam toward the outer circumferential wall of the bending section/vacuum chamber.

Abstract: An industrial compact synchrotron radiation source which can improve vacuum evacuation performance to prolong life-time of a charged particle beam and supply highly intensive stable synchrotron radiation. In the source, a charged particle beam bending duct forming a vacuum chamber through which the charged particle beam circulates is encompassed by a bending electromagnet, and at least one SR guide duct for guiding the radiation to outside extends from the outer circumferential wall of the bending duct. The SR guide duct is connected through a gate valve to an SR beam line duct for guiding the SR beam to an object to be worked and a vacuum pump is disposed on the side, close to an orbit of the charged particle beam, of the gate valve. The SR guide duct extending from the outer circumferential wall of the bending duct takes a form of a divergent duct which is widened in accordance with a spreading angle of the SR beam traveling through the SR guide duct.

Abstract: A position detecting system suitable for the position control of the surface of a workpiece mounted in an electron beam exposure system is disclosed which includes an electrically-driven light source, a first optical system for focusing a light beam from the light source on a workpiece, a position-controlling table for mounting thereon the workpiece, a second optical system for focusing light reflected from the workpiece on a predetermined image surface, a photodetector having a light receiving surface arranged on the image surface, and a negative feedback amplifier for controlling the light source by the output of the photodetector.

Abstract: In an apparatus for driving a motor wherein a carrier or stage carrying a sample thereon is located and moved to a predetermined position by controlling the slow-up and slow-down speed of the motor at the start and prior to the stopping thereof, respectively, this invention provides for speed control of the motor in accordance with a function of arbitrary characteristic slope, the function being stored in the form of a succession of digital values which may be sequentially accessed by a counter control circuit responsive to a control command signal representing the on-off condition for the motor.