Abstract: A measuring system includes a measuring probe with a contact portion that contacts a workpiece to be measured. The measuring probe operates with a first update rate during at least part of a moving mode, wherein the moving mode includes movement of the measuring probe such that the contact portion is moved away from the workpiece and/or is moved at a distance from the workpiece that is equal to or greater than a threshold distance. The measuring probe operates with a second update rate (i.e., which is faster than the first update rate) during at least part of a measuring mode, wherein the measuring mode includes movement of the measuring probe such that the contact portion is moved toward the workpiece for obtaining a measurement. In various implementations, the combined use of the first and second update rates effectively reduces power-on drift of the measuring probe.

Abstract: A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.

Abstract: A scanning probe for a coordinate measurement machine includes a stylus suspension module, a stylus position detection module, a disruptor configuration, and a signal processing and control circuitry module. The stylus position detection module includes a sensor configuration, which comprises various coils, and a shield configuration that is located around the sensor configuration and comprises electrically conductive material for shielding the sensor configuration. The stylus position detection module is mounted to the stylus suspension module utilizing a module mounting configuration, which enables the relative position of the sensor configuration to be adjusted for alignment during the assembly of the scanning probe.

Abstract: A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.

Abstract: A scanning probe for a coordinate measurement machine includes a stylus suspension module, a stylus position detection module, a disruptor configuration, and a signal processing and control circuitry module. The stylus position detection module includes a sensor configuration, which comprises various coils, and a shield configuration that is located around the sensor configuration and comprises electrically conductive material for shielding the sensor configuration. The stylus position detection module is mounted to the stylus suspension module utilizing a module mounting configuration, which enables the relative position of the sensor configuration to be adjusted for alignment during the assembly of the scanning probe.

Abstract: A scanning probe for a coordinate measuring machine with inductive position sensor signal gain control is provided. The scanning probe includes a stylus position detection portion with field generating and sensing coils, and for which corresponding output signals are indicative of a position of the probe tip of the stylus. Signal processing and control circuitry is configured to implement different operating regions, such as a central high gain operating region which corresponds to a central probe tip position range, as well as other lower gain operating regions, and for which transition operations may be performed for adjusting the gain. In various implementations, transition operations for adjusting a gain may include operations such as: adjusting power to a field generating coil configuration; adjusting a gain of a front end amplifier; altering characteristics of sensing coils; adjusting an input range of an analog to digital converter, etc.

Abstract: A workpiece holder is configured to hold a workpiece and is utilized in a metrology system which includes a sensing configuration for obtaining 3-dimensional surface data for the workpiece. The workpiece holder includes at least three reference features (e.g., spherical reference features extending from sides) that are configured to be sensed by the sensing configuration when the workpiece holder is in different orientations (e.g., as rotated 180 degrees between first and second orientations for presenting front and back sides of the workpiece towards the sensing configuration). A determination of 3-dimensional positions of the reference features for each orientation enables a combining (e.g., in a common coordinate system) of 3-dimensional surface data that is acquired for the workpiece in each orientation. Interchangeable workpiece holding portions may be provided that fit within the workpiece holder for holding workpieces with different characteristics (e.g., having different sizes and/or shapes).

Abstract: A workpiece holder is configured to hold a workpiece and is utilized in a metrology system which includes a sensing configuration for obtaining 3-dimensional surface data for the workpiece. The workpiece holder includes at least three reference features (e.g., spherical reference features extending from sides) that are configured to be sensed by the sensing configuration when the workpiece holder is in different orientations (e.g., as rotated 180 degrees between first and second orientations for presenting front and back sides of the workpiece towards the sensing configuration). A determination of 3-dimensional positions of the reference features for each orientation enables a combining (e.g., in a common coordinate system) of 3-dimensional surface data that is acquired for the workpiece in each orientation. Interchangeable workpiece holding portions may be provided that fit within the workpiece holder for holding workpieces with different characteristics (e.g., having different sizes and/or shapes).

Abstract: A scanning probe for a coordinate measuring machine with inductive position sensor signal gain control is provided. The scanning probe includes a stylus position detection portion with field generating and sensing coils, and for which corresponding output signals are indicative of a position of the probe tip of the stylus. Signal processing and control circuitry is configured to implement different operating regions, such as a central high gain operating region which corresponds to a central probe tip position range, as well as other lower gain operating regions, and for which transition operations may be performed for adjusting the gain. In various implementations, transition operations for adjusting a gain may include operations such as: adjusting power to a field generating coil configuration; adjusting a gain of a front end amplifier; altering characteristics of sensing coils; adjusting an input range of an analog to digital converter, etc.

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises two substrates located along a central axis in the probe with a motion volume therebetween, each including N rotary sensing coils (RSCs) and respective axial sensing coil configurations (ASCC). A stylus-coupled conductive disruptor moves along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) generates a changing magnetic flux encompassing the disruptor and coils, and coil signals indicate the disruptor and/or stylus position. Axial projection of the disruptor defines axial sensing overlap area (ASOA) with the ASCC, and rotary sensing overlap areas (RSOAs) with respective RSCs. The IPD is configured such that the ASOA is independent of disruptor position, and N complementary pairs (CPs) of RSCs are provided, wherein the magnitude of the change in the RSOA in the two coils of a CP is the same for any disruptor displacement.

Abstract: A coordinate measuring probe body includes a rigid probe body structure including an upper mounting portion, a compliant element mounting frame, and an axial extension portion between them. A stylus suspension portion includes compliant elements that suspend a moving element from the compliant element mounting frame. A displacement sensing arrangement that senses displacement of the moving element includes displacement sensors that output a respective displacement signals. A circuit board assembly that receives the displacement signals has three component mounting portions which are interconnected with a flexible circuit component, and located around the axial extension portion. In various embodiments, all of the compliant elements are located on a distal side of the circuit board assembly.

Abstract: A modulation monitoring system is disclosed for use with an imaging system that includes a variable focal length (VFL) lens, an objective lens, a camera, and a VFL lens controller which is configured to control the VFL lens to periodically modulate its optical power and thereby periodically modulate a focus position of the imaging system over a plurality of Z heights along a Z height direction. The modulation monitoring system comprises a VFL-traversing light source, comprising a light source configured to provide VFL-traversing light along a modulation monitoring light path through the VFL lens, and a modulation signal determining portion comprising an optical detector configured to receive the VFL-traversing light, and to provide at least one optical detector signal that corresponds to the modulated optical power of the VFL lens. The modulation monitoring portion outputs a least one modulation monitoring signal based on the at least one optical detector signal.

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises two substrates located along a central axis in the probe with a motion volume therebetween, each including N rotary sensing coils (RSCs) and respective axial sensing coil configurations (ASCC). A stylus-coupled conductive disruptor moves along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) generates a changing magnetic flux encompassing the disruptor and coils, and coil signals indicate the disruptor and/or stylus position. Axial projection of the disruptor defines axial sensing overlap area (ASOA) with the ASCC, and rotary sensing overlap areas (RSOAs) with respective RSCs. The IPD is configured such that the ASOA is independent of disruptor position, and N complementary pairs (CPs) of RSCs are provided, wherein the magnitude of the change in the RSOA in the two coils of a CP is the same for any disruptor displacement.

Abstract: A coordinate measuring probe body includes a rigid probe body structure including an upper mounting portion, a compliant element mounting frame, and an axial extension portion between them. A stylus suspension portion includes compliant elements that suspend a moving element from the compliant element mounting frame. A displacement sensing arrangement that senses displacement of the moving element includes displacement sensors that output a respective displacement signals. A circuit board assembly that receives the displacement signals has three component mounting portions which are interconnected with a flexible circuit component, and located around the axial extension portion. In various embodiments, all of the compliant elements are located on a distal side of the circuit board assembly.

Abstract: A modulation monitoring system is disclosed for use with an imaging system that includes a variable focal length (VFL) lens, an objective lens, a camera, and a VFL lens controller which is configured to control the VFL lens to periodically modulate its optical power and thereby periodically modulate a focus position of the imaging system over a plurality of Z heights along a Z height direction. The modulation monitoring system comprises a VFL-traversing light source, comprising a light source configured to provide VFL-traversing light along a modulation monitoring light path through the VFL lens, and a modulation signal determining portion comprising an optical detector configured to receive the VFL-traversing light, and to provide at least one optical detector signal that corresponds to the modulated optical power of the VFL lens. The modulation monitoring portion outputs a least one modulation monitoring signal based on the at least one optical detector signal.

Abstract: A scanning probe responsive in three axes is provided for use with a coordinate measuring machine. The scanning probe utilizes multiplexing techniques for producing X, Y and Z position signals. The X and Y position signals are indicative of a rotation of a stylus coupling portion about a rotation center, and the Z position signal is indicative of the position of the stylus coupling portion along the axial direction. The Z position signal is substantially insensitive to motion of the axial detection deflector in at least one direction that is transverse to the axial direction. The X, Y and Z position signals may be processed to determine a 3D position of a contact portion of the stylus, which may include utilizing the Z position signal in combination with known trigonometry of the scanning probe to remove axial motion cross coupling components from the X and Y position signals.

Abstract: A scanning probe responsive in three axes is provided for use with a coordinate measuring machine. The scanning probe utilizes multiplexing techniques for producing X, Y and Z position signals. The X and Y position signals are indicative of a rotation of a stylus coupling portion about a rotation center, and the Z position signal is indicative of the position of the stylus coupling portion along the axial direction. The Z position signal is substantially insensitive to motion of the axial detection deflector in at least one direction that is transverse to the axial direction. The X, Y and Z position signals may be processed to determine a 3D position of a contact portion of the stylus, which may include utilizing the Z position signal in combination with known trigonometry of the scanning probe to remove axial motion cross coupling components from the X and Y position signals.

Abstract: Reflective assemblies are provided that may be attached to the end of a chromatic confocal point sensor optical pen. Each reflective assembly includes a reflective surface (e.g., a turning mirror) oriented for directing a measurement beam along a measurement axis at a selected angle relative to the central Z-axis of the optical pen. Reflective assemblies with different orientations for the measurement beams (e.g., 60 degrees, 120 degrees, etc.) allow for measurements of workpiece features that cannot be achieved with a measurement beam directed in a normal incident manner or at a standard 90 degree orientation. In one implementation, the reflective assemblies may be kinematically located and retained using magnetic coupling, and may be rotated and reseated in different rotational orientations about the central Z-axis of the optical pen. A set of such reflective assemblies greatly increases the measurement capability of a single optical pen, in an economical manner.