Patents by Inventor Scott E. Sills

Scott E. Sills has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11973145
    Abstract: A device comprises vertically oriented transistors. The device comprises a pillar comprising at least one oxide semiconductor material, the pillar wider in a first lateral direction at an upper portion thereof than at a lower portion thereof, a gate dielectric material over sidewalls of the pillar and extending in the first lateral direction, and at least one gate electrode adjacent to at least a portion of the gate dielectric material. Related devices, electronic systems, and methods are also disclosed.
    Type: Grant
    Filed: June 10, 2022
    Date of Patent: April 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Scott E. Sills
  • Patent number: 11968821
    Abstract: A two transistor-one capacitor memory cell comprises first and second transistors laterally displaced relative one another. A capacitor is above the first and second transistors. The capacitor comprises a conductive first capacitor node directly above and electrically coupled to a first node of the first transistor. A conductive second capacitor node is directly above the first and second transistors and is electrically coupled to a first node of the second transistor. A capacitor insulator is between the first and second capacitor nodes. The second capacitor node comprises an elevationally-extending conductive pillar directly above the first node of the second transistor. The conductive pillar has an elevationally outer portion that is of four-sided diamond shape in horizontal cross-section. Other memory cells, including arrays of memory cells are disclosed as are methods.
    Type: Grant
    Filed: November 16, 2021
    Date of Patent: April 23, 2024
    Assignee: Micron Technology, Inc.
    Inventor: Scott E. Sills
  • Publication number: 20240098969
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and storage nodes formed in tiers. And, more particularly, to multiple, alternating silicon germanium (SiGe) and single crystalline silicon (Si) in different thicknesses to form tiers in which to form the horizontal access devices in vertical three-dimensional (3D) memory. The horizontally oriented access devices can have a first source/drain regions and a second source drain regions separated by single crystalline silicon (Si) channel regions. The single crystalline silicon (Si) channel regions can include a dielectric material to provide support structure to the single crystalline channel regions when forming the horizontal access devices in vertical three-dimensional (3D) memory. Horizontally oriented access lines can connect to gate structures opposing the channel regions. Vertical digit lines coupled to the first source/drain regions.
    Type: Application
    Filed: September 15, 2022
    Publication date: March 21, 2024
    Inventors: David K. Hwang, Yoshitaka Nakamura, Scott E. Sills, Si-Woo Lee, Yuanzhi Ma, Glen H. Walters
  • Publication number: 20240098970
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and storage nodes. The horizontally oriented access devices having a first source/drain regions and a second source drain regions separated by silicon (Si) channel regions. A digit line having a global digit line (GDL) contact is formed in a trench adjacent to the first source/drain regions. In one example, the digit line is electrically isolated from a neighboring digit line at the bottom of the trench. In another example, the digit line is formed continuously along a bottom surface of trench to form shared digit lines between horizontal access devices, in two separate arrays, on opposing second vertical surfaces. The memory cells have horizontally oriented storage nodes coupled to the second source/drain regions and vertical digit lines coupled to the first source/drain regions.
    Type: Application
    Filed: September 16, 2022
    Publication date: March 21, 2024
    Inventors: Scott E. Sills, Si-Woo Lee, David K. Hwang, Yoshitaka Nakamura, Yuanzhi Ma, Glen H. Walters
  • Publication number: 20240074216
    Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: November 8, 2023
    Publication date: February 29, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
  • Publication number: 20240074141
    Abstract: Methods and devices for a lateral three-dimensional memory device, are described herein. One method includes forming a thin film transistor including a first thermal process having a first range of temperatures, forming a capacitor bottom electrode of a capacitor structure including a second thermal process having a second range of temperature, wherein a maximum temperature in the second range of temperatures is less than a maximum temperature in the first range of temperatures, forming a CMOS structure including a third thermal process having a third range of temperatures, wherein a maximum temperature in the third range of temperatures is less than a maximum temperature in the second range of temperatures, and forming at least one other part of the capacitor structure.
    Type: Application
    Filed: August 24, 2022
    Publication date: February 29, 2024
    Inventors: Yoshitaka Nakamura, Yuanzhi Ma, Scott E. Sills, Si-Woo Lee, David K. Hwang
  • Patent number: 11908913
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a transistor including a source contact, a drain contact, and a channel region including an oxide semiconductor material as the channel material. At least one of the drain contact or the source contact includes a conductive material, such as ruthenium, to reduce the Schottky effects at the interface with the channel material.
    Type: Grant
    Filed: April 28, 2022
    Date of Patent: February 20, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Scott E. Sills
  • Patent number: 11898733
    Abstract: A solid state lighting (SSL) with a solid state emitter (SSE) having thermally conductive projections extending into an air channel, and methods of making and using such SSLs. The thermally conductive projections can be fins, posts, or other structures configured to transfer heat into a fluid medium, such as air. The projections can be electrical contacts between the SSE and a power source. The air channel can be oriented generally vertically such that air in the channel warmed by the SSE flows upward through the channel.
    Type: Grant
    Filed: April 3, 2023
    Date of Patent: February 13, 2024
    Assignee: Micron Technology, Inc.
    Inventor: Scott E. Sills
  • Patent number: 11848360
    Abstract: Some embodiments include an integrated assembly containing a first structure which includes one or more transition metals, and containing a second structure over the first structure. The second structure has a first region directly against the first structure and has a second region spaced from the first structure by a gap region. The second structure includes semiconductor material having at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Groups 15 and 16 of the periodic table. An ionic compound is within the gap region. Some embodiments include a method of forming an integrated assembly.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: December 19, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Yoshitaka Nakamura, Devesh Dadhich Shreeram, Yi Fang Lee, Scott E. Sills, Jerome A. Imonigie, Kaustubh Shrimali
  • Publication number: 20230397390
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and storage nodes formed in tiers. And, more particularly, to multiple, alternating epitaxially grown silicon germanium (SiGe) and single crystalline silicon (Si) in different thicknesses to form tiers in which to form the horizontal access devices in vertical three dimensional (3D) memory. The horizontally oriented access devices can have a first source/drain regions and a second source drain regions separated by epitaxially grown, single crystalline silicon (Si) channel regions. Horizontally oriented access lines can connect to gate all around (GAA) structures opposing the channel regions. Vertical digit lines coupled to the first source/drain regions.
    Type: Application
    Filed: August 15, 2022
    Publication date: December 7, 2023
    Inventors: David K. Hwang, John F. Kaeding, Matthew S. Thorum, Yuanzhi Ma, Scott E. Sills, Si-Woo Lee, Yoshitaka Nakamura, Glen H. Walters
  • Publication number: 20230397391
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and storage nodes. The horizontally oriented access devices having a first source/drain regions and a second source drain regions separated by epitaxially grown, single crystalline silicon (Si) channel regions. A support structure is provided to the epitaxially grown, single crystalline Si. Horizontally oriented access lines connect to gates opposing the channel regions formed fully around every surface of the channel region as gate all around (GAA) structures separated from the channel regions by gate dielectrics. The memory cells have horizontally oriented storage nodes coupled to the second source/drain regions and vertical digit lines coupled to the first source/drain regions.
    Type: Application
    Filed: August 15, 2022
    Publication date: December 7, 2023
    Inventors: Si-Woo Lee, Scott E. Sills, David K. Hwang, Yoshitaka Nakamura, Yuanzhi Ma, Glen H. Walters
  • Patent number: 11832454
    Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: November 28, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
  • Publication number: 20230317798
    Abstract: Systems, methods and apparatus are provided for transistors having a first source/drain region, a second source/drain region, and a channel region, wherein the channel region comprises an antimony-gallium-zinc-oxide (SbGZO) material.
    Type: Application
    Filed: April 4, 2022
    Publication date: October 5, 2023
    Inventors: Adharsh Rajagopal, Scott E. Sills, Sumeet C. Pandey, David M. Guzman
  • Patent number: 11742344
    Abstract: A semiconductor device includes a stack structure comprising decks. Each deck of the stack structure comprises a memory element level comprising memory elements and control logic level in electrical communication with the memory element level, the control logic level comprising a first subdeck structure comprising a first number of transistors comprising a P-type channel region or an N-type channel region and a second subdeck structure comprising a second number of transistors comprising the other of the P-type channel region or the N-type channel region overlying the first subdeck structure. Related semiconductor devices and methods of forming the semiconductor devices are disclosed.
    Type: Grant
    Filed: January 5, 2022
    Date of Patent: August 29, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kurt D. Beigel, Scott E. Sills
  • Patent number: 11735479
    Abstract: Some embodiments include an assembly having a CMOS tier. The CMOS tier includes a PMOS deck and an NMOS deck, with the decks being vertically offset relative to one another. The PMOS deck has p-channel transistors which are substantially identical to one another, and the NMOS deck has n-channel transistors which are substantially identical to one another. An insulative region is between the PMOS deck and the NMOS deck. The CMOS tier has one or more circuit components which include one or more of the n-channel transistors coupled with one or more of the p-channel transistors through one or more conductive interconnects extending through the insulative region. Some embodiments include methods of forming assemblies to comprise one or more CMOS tiers.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: August 22, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Kurt D. Beigel
  • Patent number: 11735672
    Abstract: Some embodiments include an integrated transistor having an active region comprising semiconductor material. A conductive gating structure is adjacent to the active region. The conductive gating structure includes an inner region proximate the active region and includes an outer region distal from the active region. The inner region includes a first material containing titanium and nitrogen, and the outer region includes a metal-containing second material. The second material has a higher conductivity than the first material. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: August 22, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Aaron Michael Lowe, Zhuo Chen, Marko Milojevic, Timothy A. Quick, Richard J. Hill, Scott E. Sills
  • Patent number: 11730069
    Abstract: The present disclosure includes memory cell structures and method of forming the same. One such method includes forming a memory cell includes forming, in a first direction, a select device stack including a select device formed between a first electrode and a second electrode; forming, in a second direction, a plurality of sacrificial material lines over the select device stack to form a via; forming a programmable material stack within the via; and removing the plurality of sacrificial material lines and etching through a portion of the select device stack to isolate the select device.
    Type: Grant
    Filed: July 13, 2020
    Date of Patent: August 15, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, D. V. Nirmal Ramaswamy
  • Publication number: 20230250948
    Abstract: A solid state lighting (SSL) with a solid state emitter (SSE) having thermally conductive projections extending into an air channel, and methods of making and using such SSLs. The thermally conductive projections can be fins, posts, or other structures configured to transfer heat into a fluid medium, such as air. The projections can be electrical contacts between the SSE and a power source. The air channel can be oriented generally vertically such that air in the channel warmed by the SSE flows upward through the channel.
    Type: Application
    Filed: April 3, 2023
    Publication date: August 10, 2023
    Inventor: Scott E. Sills
  • Patent number: 11670707
    Abstract: Some embodiments include an integrated assembly having a conductive structure, an annular structure extending through the conductive structure, and an active-material-structure lining an interior periphery of the annular structure. The annular structure includes dielectric material. The active-material-structure includes two-dimensional-material. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: June 14, 2022
    Date of Patent: June 6, 2023
    Assignee: Micron Technology, Inc.
    Inventors: David K. Hwang, John F. Kaeding, Richard J. Hill, Scott E. Sills
  • Patent number: 11658246
    Abstract: A device comprises a vertical transistor. The vertical transistor comprises a pillar structure, at least one gate electrode, and a dielectric material. The pillar structure comprises a source region, a drain region, and a channel region. The source region and the drain region each individually comprise at least one electrically conductive material configured to inhibit hydrogen permeation therethrough. The channel region comprises a semiconductive material vertically between the source region and the drain region. The at least one gate electrode laterally neighbors the channel region of the semiconductive structure. The dielectric material is laterally between the semiconductive structure and the at least one gate electrode. Additional devices, and related electronic systems and methods are also disclosed.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: May 23, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Ramanathan Gandhi, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Scott E. Sills