Abstract: An apparatus including a first device configured to support a substrate thereon; a first transport having the first device connected thereto, where the first transport includes: rails or maglev guides; a magnetic system configured to vertically space the first device over the rails or maglev guides with a gap between the first device and the rails or maglev guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and a linear actuator configured to move the first device along the rails or maglev guides.

Abstract: An apparatus including a first device configured to support a substrate thereon; a first transport having the first device connected thereto, where the first transport includes: rails or maglev guides; a magnetic system configured to vertically space the first device over the rails or maglev guides with a gap between the first device and the rails or maglev guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and a linear actuator configured to move the first device along the rails or maglev guides.

Abstract: An electric-powered fail-safe actuator for use with a valve, where the actuator stores potential energy for conversion to kinetic energy to close or open the valve to the fail-safe position.

Abstract: An electric-powered fail-safe actuator for use with a valve, where the actuator stores potential energy for conversion to kinetic energy to close or open the valve to the fail-safe position.

Abstract: An apparatus including a first device configured to support a substrate thereon; a first transport having the first device connected thereto, where the first transport includes: rails or maglev guides; a magnetic system configured to vertically space the first device over the rails or maglev guides with a gap between the first device and the rails or maglev guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and a linear actuator configured to move the first device along the rails or maglev guides.

Abstract: An apparatus for filling differently sized containers with fluid includes a filling head having a fluid holding area. At least one multi-container filling nozzle connected to the filling head, wherein at least two containers with differently-sized openings are fillable with a quantity of fluid from the fluid holding area without changing the multi-container filling nozzle. Related methods and devices for filing containers with differently-sized openings with fluid without changing a fluid nozzle are also disclosed.

Abstract: An apparatus for filling differently sized containers with fluid includes a filling head having a fluid holding area. At least one multi-container filling nozzle connected to the filling head, wherein at least two containers with differently-sized openings are fillable with a quantity of fluid from the fluid holding area without changing the multi-container filling nozzle. Related methods and devices for filing containers with differently-sized openings with fluid without changing a fluid nozzle are also disclosed.