Patents by Inventor Scott L. Battle, JR.

Scott L. Battle, JR. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIVERY SYSTEM
    Publication number: 20220298629
    Abstract: A chemical delivery system includes a bulk container, a run/refill chamber, a first conduit and a second conduit. The bulk container stores a precursor. The run/refill chamber includes a plurality of spaced tubes having a plurality of surfaces for receiving the precursor in vapor form and storing the precursor in solid form. The first conduit connects the bulk container to the run/refill chamber for transporting the precursor from the bulk container to the run/refill chamber in vapor form. The second conduit connects the run/refill chamber to a deposition chamber for transporting the precursor from the run/refill chamber to the deposition chamber in vapor form.
    Type: Application
    Filed: May 31, 2022
    Publication date: September 22, 2022
    Inventors: David James Eldridge, David Peters, Robert Wright, JR., Bryan C. Hendrix, Scott L. Battle, JR., John Gregg