Patents by Inventor Scott Singlevich

Scott Singlevich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System to detect wafer arcing in semiconductor manufacturing equipment
    Patent number: 10283421
    Abstract: Methods and systems for accurate arc detection in semiconductor manufacturing tools are disclosed. Such methods and systems provide real-time arc detection and near real-time notification for corrective actions during a semiconductor manufacturing process. Such methods and systems utilize data with high sample rate and wavelet analysis to provide for more accurate arc detection, which leads to more effective and cost efficient semiconductor manufacturing operations.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: May 7, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Scott Singlevich, Kommisetti Subrahmanyam, Tony Davis, Michael Johnson
  • SYSTEM TO DETECT WAFER ARCING IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
    Publication number: 20170077002
    Abstract: Methods and systems for accurate arc detection in semiconductor manufacturing tools are disclosed. Such methods and systems provide real-time arc detection and near real-time notification for corrective actions during a semiconductor manufacturing process. Such methods and systems utilize data with high sample rate and wavelet analysis to provide for more accurate arc detection, which leads to more effective and cost efficient semiconductor manufacturing operations.
    Type: Application
    Filed: November 28, 2016
    Publication date: March 16, 2017
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Scott Singlevich, Kommisetti Subrahmanyam, Tony Davis, Michael Johnson
  • Method to detect wafer arcing in semiconductor manufacturing equipment
    Patent number: 9508612
    Abstract: Methods and systems for accurate arc detection in semiconductor manufacturing tools are disclosed. Such methods and systems provide real-time arc detection and near real-time notification for corrective actions during a semiconductor manufacturing process. Such methods and systems utilize data with high sample rate and wavelet analysis to provide for more accurate arc detection, which leads to more effective and cost efficient semiconductor manufacturing operations.
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: November 29, 2016
    Assignee: Applied Materials, Inc.
    Inventors: Scott Singlevich, Kommisetti Subrahmanyam, Tony Davis, Michael Johnson
  • METHOD TO DETECT WAFER ARCING IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
    Publication number: 20130245969
    Abstract: Methods and systems for accurate arc detection in semiconductor manufacturing tools are disclosed. Such methods and systems provide real-time arc detection and near real-time notification for corrective actions during a semiconductor manufacturing process. Such methods and systems utilize data with high sample rate and wavelet analysis to provide for more accurate arc detection, which leads to more effective and cost efficient semiconductor manufacturing operations.
    Type: Application
    Filed: November 28, 2012
    Publication date: September 19, 2013
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Scott Singlevich, Kommisetti Subrahmanyam, Tony Davis, Michael Johnson