Patents by Inventor Sean Herbert

Sean Herbert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In-situ health check of liquid injection vaporizer
    Publication number: 20040163590
    Abstract: Early detection of clogging of a liquid precursor injection valve in a gas delivery system of a semiconductor fabrication tool is allowed through monitoring pressure upstream of the injection valve. The increase in pressure associated with obstruction of the valve may trigger an alarm alerting the operator, allowing for rapid correction of the problem before substantial numbers of wafers are improperly processed utilizing the clogged valve.
    Type: Application
    Filed: February 24, 2003
    Publication date: August 26, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Toan Tran, Yen-Kun Wang, Steve Ghanayem, Sean Herbert, Won B. Bang