Patents by Inventor Sebastian Schall

Sebastian Schall has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Source hollow body and EUV plasma light source comprising such a source hollow body
    Patent number: 10039177
    Abstract: A source hollow body serves for predefining a plasma chamber for a section of a source plasma of an EUV plasma light source. The hollow body has at least one chamber wall that delimits the plasma chamber. The chamber wall has a multilayer construction. This results in a source hollow body that improves the practical usability of an EUV plasma light source equipped with the source hollow body.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: July 31, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Almut Czap, Sebastian Schall
  • SOURCE HOLLOW BODY AND EUV PLASMA LIGHT SOURCE COMPRISING SUCH A SOURCE HOLLOW BODY
    Publication number: 20180035525
    Abstract: A source hollow body serves for predefining a plasma chamber for a section of a source plasma of an EUV plasma light source. The hollow body has at least one chamber wall that delimits the plasma chamber. The chamber wall has a multilayer construction. This results in a source hollow body that improves the practical usability of an EUV plasma light source equipped with the source hollow body.
    Type: Application
    Filed: July 26, 2017
    Publication date: February 1, 2018
    Inventors: Almut Czap, Sebastian Schall