Abstract: A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

Abstract: A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

Abstract: A vacuum pump drive comprising at least one electric motor which is connected to the rotor of a vacuum pump via a drive shaft, a frequency converter which is electrically connected to the motor and which supplies a motor input voltage to the motor, and a switchover device with at least one electric switch. The switchover device is designed to connect the motor windings in a star or delta shape depending on the switching position of the switch in order to change the motor characteristic curve. The vacuum pump drive also comprises a measuring device with sensors for detecting physical operating variables of the vacuum pump and a controller which is electrically or optically connected to the switchover device and the measuring device and which is designed to actuate the at least one switch on the basis of the measured value of the operating variable of the vacuum pump in order to produce the star-delta switchover.

Abstract: A vacuum pump drive having an electric motor and a frequency converterelectrically connected to the electric motor and arranged at a distance to the motor, wherein in the electric feed line from the frequency converter to the electric motor a transformer in the form of a transmitter of ferrite or sinter material is arranged.

Abstract: A vacuum pump drive having an electric motor and a frequency converter electrically connected to the electric motor and arranged at a distance to the motor, wherein in the electric feed line from the frequency converter to the electric motor a transformer in the form of a transmitter of ferrite or sinter material is arranged.

Abstract: The invention relates to a vacuum pump drive including an electric motor driving the rotor of a vacuum pump, a first frequency converter connected to the electric motor and designed to generate a motor input voltage for driving the electric motor from a network supply voltage, at least one second frequency converter that is also designed to generate a motor input voltage of a variable frequency from a network supply voltage, in order to drive the motor according to the frequency of the motor input voltage, characterized in that the second frequency converter is provided with a measuring device, which is provided for measuring the motor input voltage generated by the first frequency converter and/or the related motor input current, in order to synchronize the second frequency converter with the first frequency converter.

Abstract: A vacuum pump drive comprising at least one electric motor which is connected to the rotor of a vacuum pump via a drive shaft, a frequency converter which is electrically connected to the motor and which supplies a motor input voltage to the motor, and a switchover device with at least one electric switch. The switchover device is designed to connect the motor windings in a star or delta shape depending on the switching position of the switch in order to change the motor characteristic curve. The vacuum pump drive also comprises a measuring device with sensors for detecting physical operating variables of the vacuum pump and a controller which is electrically or optically connected to the switchover device and the measuring device and which is designed to actuate the at least one switch on the basis of the measured value of the operating variable of the vacuum pump in order to produce the star-delta switchover.