Abstract: An apparatus for controlling a neutron beam includes a plurality of columnar prisms 1 that are made of a material having a refractive index of less than 1 for a neutron beam, and are arranged so as to be multi-layered. The columnar prisms 1 each have an approximately right-triangle-shaped section, and are three-dimensionally multi-layered such that respective surfaces 1a, 1b, 1c of the columnar prisms are in parallel to one another. Stick-shaped members 5 are made of the above material, the stick-shaped members 5 are set in a plurality of grooves formed on a jig 6 that have the same shape, and upper surfaces of the grooves are flattened at the same time.

Abstract: An aspherical reference surface 2 is manufactured with such a shape accuracy that an interference band appears according to the aspherical shape of a surface 1 to be measured, an aspherical wave front 3 is formed using the reference surface, and a large aspherical surface is measured from interference within a short time. The aspherical reference surface is an aspherical surface optical element 10 manufactured by fly-cutting or ELID-grinding, that produces the interference band from light reflected from the aspherical surface and predetermined reference light, and thereby measures the shape of the aspherical surface from interference. The aspherical surface optical element should be an aspherical reflecting mirror with such a shape accuracy that an interference band is generated and parallel light is reflected in the direction normal to the surface to be measured. Thus, the shape can be measured in a short time without using an aspherical surface standard.

Abstract: A probe head 10 and a laser interferometric displacement meter 20 are provided. The probe head supports a probe 2 that is capable of contacting a workpiece 1, that is free to move in the direction of the workpiece, and drives the probe towards the workpiece. The displacement meter measures the displacement of the probe with a high accuracy without contact. The probe head 10 is also provided with a probe shaft 12 with steps 11a, 11b at intermediate portions thereof and air bearings 14a, 14b that support the probe shaft on each side of the steps. The air bearings have a high stiffness in the radial direction, and the probe shaft is made to float by using compressed air, thus the resistance of the shaft to sliding is reduced. In addition, another compressed air is supplied to the location of the step and produces a driving force in the direction of the workpiece due to the difference of cross sectional areas on each side of the step, that provides a very small load within a predetermined range.

Abstract: An electrolytic in-process dressing device 10 is provided with a disk-shaped metal-bonded grindstone 2 with a surface 2a with a circular arc shape with a radius R at its outer periphery and a numerical control device 16. The disk-shaped metal-bonded grindstone 2 rotates around an axis Y, and the grindstone is dressed electrolytically while the device 10 grinds the workpiece 1. The numerical control device 16 is provided with a rotary truing device 12 that rotates around the X axis that orthogonally crosses the axis of rotation Y and trues the circular arc surface 2a, a shape measuring device 14 for measuring the shape of the circular arc surface of the grindstone and the shape of the processed surface of workpiece 1 on the machine, and controls the grindstone numerically in the three directions along the axes X, Y and Z. The numerical control device 16 moves the grindstone in three axial directions and repeats the operations of truing, grinding and measurements on-line.

Abstract: A voltage is applied between a cylindrical cutting grindstone 2 that rotates about a vertical axis Y and a cylindrical truing grindstone 6 that rotates about a horizontal axis X. The vertical outer surface 2a and the horizontal lower surface 2b of the cutting grindstone are trued by a plasma discharge. Then without applying the voltage, the cutting grindstone 2 is trued mechanically by the truing grindstone 6, and while the outer periphery and lower surface of the cutting grindstone are dressed electrolytically, the outer periphery and lower surface are made to contact a workpiece 1 and process a micro-V groove. This method makes it possible to produce an immersion grating with a high resolution using hard, brittle materials such as germanium, gallium arsenide and lithium niobate.

Abstract: A conductive grindstone 12, a circular disk-like discharge electrode 14 with an outer rim 14a that can access a machining surface 12a of the grindstone, an electrode rotating device 16, a position controlling device 18 that controls the relative position between the outer rim of the electrode and the grindstone, a voltage applying device 20 for applying voltage pulses between the grindstone and the electrode, and a mist-supplying device 22 that supplies pressurized conductive mist between the grindstone and the electrode are provided. The pressurized conductive mist is a mixture of a low-conductivity aqueous solution and compressed air. A plasma discharge is generated between the grindstone and the electrode by means of this pressurized conductive mist, and the grindstone is subjected to truing.

Abstract: A rotating table 2 that holds a flat neutron lens component 1 and rotates about an axis of rotation Z, a circular-disk type of metal-bonded grinding wheel 3 with tapering surface 3a on the outer periphery thereof, a grinding wheel driving device 4 drives and rotates the grinding wheel around the axis A thereof, an electrode 5 with a surface close to the single tapering surface or the plurality of tapering surfaces of the grinding wheel, a power source 6 that applies an electrolytic voltage between the grinding wheel and the electrode, and a grinding fluid feeder 8 that supplies a conducting grinding fluid between the grinding wheel and the electrode are provided.

Abstract: An electrolytic in-process dressing device 10 is provided with a disk-shaped metal-bonded grindstone 2 with a surface 2a with a circular arc shape with a radius R at its outer periphery and a numerical control device 16. The disk-shaped metal-bonded grindstone 2 rotates around an axis Y, and the grindstone is dressed electrolytically while the device 10 grinds the workpiece 1. The numerical control device 16 is provided with a rotary truing device 12 that rotates around the X axis that orthogonally crosses the axis of rotation Y and trues the circular arc surface 2a, a shape measuring device 14 for measuring the shape of the circular arc surface of the grindstone and the shape of the processed surface of workpiece 1 on the machine, and controls the grindstone numerically in the three directions along the axes X, Y and Z. The numerical control device 16 moves the grindstone in three axial directions and repeats the operations of truing, grinding and measurements on-line.

Abstract: A voltage is applied between a cylindrical cutting grindstone 2 that rotates about a vertical axis Y and a cylindrical truing grindstone 6 that rotates about a horizontal axis X. The vertical outer surface 2a and the horizontal lower surface 2b of the cutting grindstone are trued by a plasma discharge. Then without applying the voltage, the cutting grindstone 2 is trued mechanically by the truing grindstone 6, and while the outer periphery and lower surface of the cutting grindstone are dressed electrolytically, the outer periphery and lower surface are made to contact a workpiece 1 and process a micro-V groove. This method makes it possible to produce an immersion grating with a high resolution using hard, brittle materials such as germanium, gallium arsenide and lithium niobate.

Abstract: A tool is constructed by a plurality of diamond columns 22 arranged so as to protrude from a working surface and a conductive bond member 24 for integrally fixing the diamond columns. The conductive bond member is electrolytically dressed while a conductive liquid is supplied between the bond member and an electrode 4 which faces the bond member at a distance, thereby enabling the diamond columns 22 to protrude. By this construction, the tool can be applied to both an efficient rough cutting for a ductile material and a precise grinding for a brittle material without detaching or re-attaching a workpiece, the relatively soft ductile material such as aluminum, copper, or plastic can be worked with a deep cut, the brittle material such as monocrystal silicon, glass, or tungsten carbide can be efficiently and stably ground, so that a fluctuation of a working position due to wear can be compensated.

Abstract: A photo-reactive grinding wheel 1 is irradiated with light by a light irradiation device 2 which is provided opposite to the grinding wheel, to bring about a chemical reaction and change in property, and dissolved/removed by a solution 4. Simultaneously, a workpiece 5 is processed by the photo-reactive grinding wheel 1. Thus, processing can be performed without causing clogging in the grinding wheel of a resin bond containing fine abrasive grains, high-grade surface roughness can be realized, and processing efficiency is relatively high. The controllability of the dressing is excellent, automation of dressing and in-process dressing can also be realized, a system which contains no metal ion in the whole processing can be designed, an expensive device is not required, and handling is easy.

Abstract: An electrode (4) is disposed spaced away from and in facing relation with an electrically conductive grinding wheel (2). There is applied a voltage across the grinding wheel and the electrode with making electrically conductive fluid (7) flow between the grinding wheel and the electrode. A position of the grinding wheel is numerically controlled with the grinding wheel being dressed by electrolysis to thereby grind a work with the grinding wheel. The work is ground in accordance with command data Zx.sup.(i), and then a shape of a ground surface is measured by means of a measuring device (12). The measurement data is filtered to thereby record shape error data e.sub.x.sup.(i). There is established new command data Zx.sup.(i+1) by adding compensation, and then the work is ground again with the thus established new command data. The compensation refers to past command data, and determines new command data to be equal to an expected value of the past command data.