Patents by Inventor Seihiro Sasaki

Seihiro Sasaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for heat treating substrates capable of quick cooling
    Patent number: 4925388
    Abstract: An apparatus for heat treating and quickly cooling substrates. The apparatus includes a cylindrical furnace core tube for containing substrates, a heater enclosing the furnace core tube, and outer cylinder enclosing and containing the furnace core tube and the heater, a blower for drafting cooling air to the space between the furnace core tube and the outer cylinder along the longitudinal direction of the furnace core tube, and a switching valve connected between the blower and both ends of the outer cylinder for switching the direction in which the cooling air travels. Since the direction of the cooling air is changed, the entire furnace core tube is uniformly cooled.
    Type: Grant
    Filed: September 22, 1989
    Date of Patent: May 15, 1990
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Izuru Iseki, Akihiro Higashi, Seihiro Sasaki