Abstract: A resist protective film protects front surfaces of a front electrode and a polyimide protective film. With a BG tape affixed to the resist protective film, a semiconductor substrate is ground from a rear surface to a predetermined product thickness. After the BG tape is removed, a predetermined diffusion region is formed in a surface layer at the ground rear surface of the semiconductor substrate. The resist protective film is heated to and maintained at a temperature of at least 100 degrees C., for evaporating water in the resist protective film. Laser is irradiated from the rear surface of the semiconductor substrate, activating an impurity of the diffusion region. The resist protective film is removed. Thus, during heat treatment for impurity activation at one main surface of the semiconductor wafer, deterioration, peeling, and deformation of the resist protective film protecting the other main surface of the semiconductor wafer may be suppressed.

Abstract: A resist protective film protects front surfaces of a front electrode and a polyimide protective film. With a BG tape affixed to the resist protective film, a semiconductor substrate is ground from a rear surface to a predetermined product thickness. After the BG tape is removed, a predetermined diffusion region is formed in a surface layer at the ground rear surface of the semiconductor substrate. The resist protective film is heated to and maintained at a temperature of at least 100 degrees C., for evaporating water in the resist protective film. Laser is irradiated from the rear surface of the semiconductor substrate, activating an impurity of the diffusion region. The resist protective film is removed. Thus, during heat treatment for impurity activation at one main surface of the semiconductor wafer, deterioration, peeling, and deformation of the resist protective film protecting the other main surface of the semiconductor wafer may be suppressed.

Abstract: An object of the invention is to provide an electronic component mounting device and a work method of the electronic component mounting device, capable of ensuring safety of an operator who accesses a work line through a door portion, and avoiding reduction of workability. A space defined by a base (11) and a cover member (14) is partitioned by a partition member (15) to define a plurality of work line storing spaces (SP1). A plurality of work lines (12) are stored in the respective work line storing spaces (SP1) individually. When any of a plurality of door portions (14a) provided in the cover member (14) so as to allow an access to an inside of the respective work line storing spaces (SP1) is opened, an operation of a work line (12) stored in a work line storing space (SP1) accessible through the opened door portion (14a) is stopped.

Abstract: An object of the invention to provide a screen printing machine allows, during maintenance work for one printing device, the other printing device to continue its screen printing work, and a method for controlling an inside temperature of a screen printing machine. A space surrounded by a base (12) and a cover member (11) is divided into two portions by a partition member (14), and two printing devices (13) are accommodated in two working compartments (15), respectively, which are defined by the base (12), the cover member (11) and the partition member (14), whereby temperature-controlled air is blown into each of the working compartments (15) via an air pipe (71) which branches into two air vents (72) opened to the respective working compartments (15).

Abstract: To provide a screen printing apparatus and a screen printing method which can enhance a plate separating property after a printing operation regardless of a type of a mask, thereby suppressing occurrence of printing failure. A screen printing apparatus includes mask supporting means 6 for supporting a mask 2 from the rear surface thereof, holding means 20 for holding a printing medium 3, posture changing means 30 for changing a posture of the printing medium 3 held by the holding means 20 between a parallel posture parallel to the mask 2 and a tilted posture tilted about the mask 2, and lifting means for lifting the holding means 20 so as to contact and separate the surface of the printing medium 3 with or from the rear surface of the mask 2. Here, the printing medium 3 having been subjected to a pattern printing operation is separated from the mask 2 from one end of the printing medium to the other end thereof.

Abstract: There is provided a screen printer capable of concurrently, efficiently subjecting a plurality of substrates, including different types of substrates, to printing operation. In a screen printer 2 that makes up an electronic component mounting line 1 and that prints electronic component bonding paste on a substrate, a substrate conveyance section 8 that conveys a substrate 5 forwardly or backwardly in a direction of conveyance of a substrate is disposed at an intermediate position between a first screen printing section 7A and a second screen printing section 7B arranged symmetrically with respect to a center line CL. It thereby becomes possible to adopt a variety of substrate conveyance forms, as required, such as return conveyance for returning the substrate 5 from a downstream machine to an upstream side of the screen printer 2 and bypass conveyance for letting the substrate sent from an upstream side pass through the screen printer, to thus be conveyed to a downstream machine.

Abstract: A screen printer capable of concurrently, efficiently subjecting a plurality of different types of substrates, to a printing operation. The screen printer makes up an electronic component mounting line and prints electronic component bonding paste on a substrate. A substrate conveyance section that conveys a substrate forwardly or backwardly in a direction of conveyance of a substrate is disposed at an intermediate position between a first screen printing section and a second screen printing section arranged symmetrically with respect to a center line CL. It thereby becomes possible to adopt a variety of substrate conveyance forms, as required, such as return conveyance for returning the substrate from a downstream machine to an upstream side of the screen printer and bypass conveyance for letting the substrate sent from an upstream side pass through the screen printer, to thus be conveyed to a downstream machine.

Abstract: A screen printer capable of concurrently, efficiently subjecting a plurality of different types of substrates, to a printing operation. The screen printer makes up an electronic component mounting line and prints electronic component bonding paste on a substrate. A substrate conveyance section that conveys a substrate forwardly or backwardly in a direction of conveyance of a substrate is disposed at an intermediate position between a first screen printing section and a second screen printing section arranged symmetrically with respect to a center line CL. It thereby becomes possible to adopt a variety of substrate conveyance forms, as required, such as return conveyance for returning the substrate from a downstream machine to an upstream side of the screen printer and bypass conveyance for letting the substrate sent from an upstream side pass through the screen printer, to thus be conveyed to a downstream machine.

Abstract: A screen printer capable of concurrently, efficiently subjecting a plurality of different types of substrates, to a printing operation. The screen printer makes up an electronic component mounting line and prints electronic component bonding paste on a substrate. A substrate conveyance section that conveys a substrate forwardly or backwardly in a direction of conveyance of a substrate is disposed at an intermediate position between a first screen printing section and a second screen printing section arranged symmetrically with respect to a center line CL. It thereby becomes possible to adopt a variety of substrate conveyance forms, as required, such as return conveyance for returning the substrate from a downstream machine to an upstream side of the screen printer and bypass conveyance for letting the substrate sent from an upstream side pass through the screen printer, to thus be conveyed to a downstream machine.

Abstract: A screen printer capable of concurrently, efficiently subjecting a plurality of different types of substrates, to a printing operation. The screen printer makes up an electronic component mounting line and prints electronic component bonding paste on a substrate. A substrate conveyance section that conveys a substrate forwardly or backwardly in a direction of conveyance of a substrate is disposed at an intermediate position between a first screen printing section and a second screen printing section arranged symmetrically with respect to a center line CL. It thereby becomes possible to adopt a variety of substrate conveyance forms, as required, such as return conveyance for returning the substrate from a downstream machine to an upstream side of the screen printer and bypass conveyance for letting the substrate sent from an upstream side pass through the screen printer, to thus be conveyed to a downstream machine.

Abstract: To provide a screen printing apparatus and a screen printing method which can enhance a plate separating property after a printing operation regardless of a type of a mask, thereby suppressing occurrence of printing failure. A screen printing apparatus includes mask supporting means 6 for supporting a mask 2 from the rear surface thereof, holding means 20 for holding a printing medium 3, posture changing means 30 for changing a posture of the printing medium 3 held by the holding means 20 between a parallel posture parallel to the mask 2 and a tilted posture tilted about the mask 2, and lifting means for lifting the holding means 20 so as to contact and separate the surface of the printing medium 3 with or from the rear surface of the mask 2. Here, the printing medium 3 having been subjected to a pattern printing operation is separated from the mask 2 from one end of the printing medium to the other end thereof.

Abstract: An object of the invention to provide a screen printing machine allows, during maintenance work for one printing device, the other printing device to continue its screen printing work, and a method for controlling an inside temperature of a screen printing machine. A space surrounded by a base (12) and a cover member (11) is divided into two portions by a partition member (14), and two printing devices (13) are accommodated in two working compartments (15), respectively, which are defined by the base (12), the cover member (11) and the partition member (14), whereby temperature-controlled air is blown into each of the working compartments (15) via an air pipe (71) which branches into two air vents (72) opened to the respective working compartments (15).

Abstract: An object of the invention is to provide an electronic component mounting device and a work method of the electronic component mounting device, capable of ensuring safety of an operator who accesses a work line through a door portion, and avoiding reduction of workability. A space defined by a base (11) and a cover member (14) is partitioned by a partition member (15) to define a plurality of work line storing spaces (SP1). A plurality of work lines (12) are stored in the respective work line storing spaces (SP1) individually. When any of a plurality of door portions (14a) provided in the cover member (14) so as to allow an access to an inside of the respective work line storing spaces (SP1) is opened, an operation of a work line (12) stored in a work line storing space (SP1) accessible through the opened door portion (14a) is stopped.

Abstract: Movable claws 13 are formed in clampers 10 holding a substrate 3 so that the movable claws can be selectively moved to a position where they have projected above the substrate 3, and to a position where they have retreated from above the substrate 3. Thereby, the safety of operation is ensured by causing the movable claws 13 to retreat during maintenance. Moreover, printing with high precision can be performed in a state where the surface of the substrate 3 and the rear face of the mask 2 are brought into surface contact with each other without any clearance by causing the movable claws 13 to retreat.

Abstract: There is provided a screen printer capable of concurrently, efficiently subjecting a plurality of substrates, including different types of substrates, to printing operation. In a screen printer 2 that makes up an electronic component mounting line 1 and that prints electronic component bonding paste on a substrate, a substrate conveyance section 8 that conveys a substrate 5 forwardly or backwardly in a direction of conveyance of a substrate is disposed at an intermediate position between a first screen printing section 7A and a second screen printing section 7B arranged symmetrically with respect to a center line CL. It thereby becomes possible to adopt a variety of substrate conveyance forms, as required, such as return conveyance for returning the substrate 5 from a downstream machine to an upstream side of the screen printer 2 and bypass conveyance for letting the substrate sent from an upstream side pass through the screen printer, to thus be conveyed to a downstream machine.

Abstract: A screen printing apparatus and a screen printing method facilitating to adjust a state of filling a paste. By adjusting a pneumatic pressure of pressing a squeezee 9a formed with a flexible region at at least a portion thereof to a surface of a mask 2, the squeezee 9a is moved up and down to follow recesses and projections of a surface of the mask 2 substantially in real time and an attack angle ? in sliding is maintained substantially constant. Thereby, a state of filling a paste can be stabilized without being influenced by recesses and projections of the surface of the mask 2 and promotion of a print quality can be expected. Further, bending is produced at the squeezee 9a by only adjusting the pneumatic pressure, and therefore, an attack angle ? in correspondence with a change in a print condition of a kind or a property of the paste, a thickness of the mask and the like can easily be changed.

Abstract: Movable claws 13 are formed in dampers 10 holding a substrate 3 so that the movable claws can be selectively moved to a position where they have projected above the substrate 3, and to a position where they have retreated from above the substrate 3. Thereby, the safety of operation is ensured by causing the movable claws 13 to retreat during maintenance. Moreover, printing with high precision can be performed in a state where the surface of the substrate 3 and the rear face of the mask 2 are brought into surface contact with each other without any clearance by causing the movable claws 13 to retreat.

Abstract: To provide a screen printing apparatus and a screen printing method which can enhance a plate separating property after a printing operation regardless of a type of a mask, thereby suppressing occurrence of printing failure. A screen printing apparatus includes mask supporting means 6 for supporting a mask 2 from the rear surface thereof, holding means 20 for holding a printing medium 3, posture changing means 30 for changing a posture of the printing medium 3 held by the holding means 20 between a parallel posture parallel to the mask 2 and a tilted posture tilted about the mask 2, and lifting means for lifting the holding means 20 so as to contact and separate the surface of the printing medium 3 with or from the rear surface of the mask 2. Here, the printing medium 3 having been subjected to a pattern printing operation is separated from the mask 2 from one end of the printing medium to the other end thereof.

Abstract: In a screen printing apparatus which prints solder cream on a substrate by a closed type squeeze head, in print space 35 that houses the solder cream 5 pressurized in a paste storing part and brings the solder cream 5 into contact with a surface of a mask plate, a hollow heat regulating member 37 provided in a horizontal direction orthogonal to a squeezing direction is caused to pass, and a heat regulating medium is circulated inside the heat regulating member 37 by a heat regulator 40, whereby the solder cream 5 in the print space 35 can be always kept at an appropriate temperature and at an appropriate viscosity, so that print quality can be secured.

Abstract: A cream solder cartridge used in a screen printing apparatus which prints cream solder on a board through pattern holes by sliding, on a mask plate, a closed squeegee that is stored with cream solder inside is composed of a long and narrow concave portion made of a flexible film-like material, a brim portion projecting from the outer periphery of the concave portion, and a film-like cover sheet that is stuck to the brim portion and thereby closes the opening of the concave portion. This configuration makes it possible to supply paste at a low cost and to perform a viscosity adjustment easily by externally stirring the paste accommodated inside.