Patents by Inventor Seiji Kashiwagi
Seiji Kashiwagi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11586198Abstract: A charging system includes a charging station having: a base underwater; a pole extending in an upper-lower direction; and a power supplying portion. An AUV includes: an underwater main body; a power receiving portion; a holding device including a pair of guide and holding portions, the pair of guide portions guides the pole to a holding position after the pole contacts the guide portions from a proceeding-direction, the holding portion holds the pole to be rotatable relative to the pole; a thrust generating apparatus generates in a horizontal direction; and a control device controls the thrust generating apparatus. A light emitter at one of the base and the underwater main body, and a light receiver is provided at the other. The control device controls the thrust so the underwater main body reaches a rotational position where the light receiver receives light emitted, the rotational position set relative to the pole.Type: GrantFiled: September 3, 2018Date of Patent: February 21, 2023Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHAInventors: Minehiko Mukaida, Noriyuki Okaya, Manabu Matsui, Toshiya Hayashi, Kosuke Masuda, Seiji Kashiwagi, Takashi Okada, Fumitaka Tachinami
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Publication number: 20210072746Abstract: A charging system includes a charging station having: a base underwater; a pole extending in an upper-lower direction; and a power supplying portion. An AUV includes: an underwater main body; a power receiving portion; a holding device including a pair of guide and holding portions, the pair of guide portions guides the pole to a holding position after the pole contacts the guide portions from a proceeding-direction, the holding portion holds the pole to be rotatable relative to the pole; a thrust generating apparatus generates in a horizontal direction; and a control device controls the thrust generating apparatus. A light emitter at one of the base and the underwater main body, and a light receiver is provided at the other. The control device controls the thrust so the underwater main body reaches a rotational position where the light receiver receives light emitted, the rotational position set relative to the pole.Type: ApplicationFiled: September 3, 2018Publication date: March 11, 2021Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHAInventors: Minehiko MUKAIDA, Noriyuki OKAYA, Manabu MATSUI, Toshiya HAYASHI, Kosuke MASUDA, Seiji KASHIWAGI, Takashi OKADA, Fumitaka TACHINAMI
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Patent number: 10920981Abstract: A burner head that constitutes a combustion chamber for an exhaust gas processing apparatus by being attached to an upper portion of a combustion chamber main body is provided. The burner head includes a chassis which has a cylindrical portion having a lower opening and in which a fastening module for removably fastening to the combustion chamber main body is provided, a fuel nozzle that blows fuel into the cylindrical portion, a combustion supporting gas nozzle that blows combustion supporting gas into the cylindrical portion, a processing gas nozzle that blows processing gas into the cylindrical portion, and a pilot burner that ignites the fuel and/or the combustion supporting gas.Type: GrantFiled: August 18, 2017Date of Patent: February 16, 2021Assignee: EBARA CORPORATIONInventors: Kazutomo Miyazaki, Tetsuo Komai, Seiji Kashiwagi, Kazumasa Hosotani, Takeshi Eda
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Patent number: 10632419Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.Type: GrantFiled: March 20, 2018Date of Patent: April 28, 2020Assignee: EBARA CORPORATIONInventors: Toshiharu Nakazawa, Tetsuro Sugiura, Kohtaro Kawamura, Toyoji Shinohara, Takashi Kyotani, Keiichi Ishikawa, Seiji Kashiwagi, Yasuhiko Suzuki, Hideo Arai
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Patent number: 10557631Abstract: An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.Type: GrantFiled: July 31, 2018Date of Patent: February 11, 2020Assignee: EBARA CORPORATIONInventors: Kazutomo Miyazaki, Tetsuo Komai, Seiji Kashiwagi
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Publication number: 20190212007Abstract: A burner head that constitutes a combustion chamber for an exhaust gas processing apparatus by being attached to an upper portion of a combustion chamber main body is provided. The burner head includes a chassis which has a cylindrical portion having a lower opening and in which a fastening module for removably fastening to the combustion chamber main body is provided, a fuel nozzle that blows fuel into the cylindrical portion, a combustion supporting gas nozzle that blows combustion supporting gas into the cylindrical portion, a processing gas nozzle that blows processing gas into the cylindrical portion, and a pilot burner that ignites the fuel and/or the combustion supporting gas.Type: ApplicationFiled: August 18, 2017Publication date: July 11, 2019Inventors: Kazutomo MIYAZAKI, Tetsuo KOMAI, Seiji KASHIWAGI, Kazumasa HOSOTANI, Takeshi EDA
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Patent number: 10215407Abstract: A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.Type: GrantFiled: November 6, 2015Date of Patent: February 26, 2019Assignee: EBARA CORPORATIONInventors: Kazutomo Miyazaki, Tetsuo Komai, Toyoji Shinohara, Seiji Kashiwagi
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Publication number: 20190041058Abstract: An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.Type: ApplicationFiled: July 31, 2018Publication date: February 7, 2019Inventors: Kazutomo MIYAZAKI, Tetsuo KOMAI, Seiji KASHIWAGI
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Patent number: 10174942Abstract: A combustion-type exhaust gas treatment apparatus has a combustion treatment chamber for treating exhaust gas by combusting and decomposing the exhaust gas, a main burner for forming a flame in the combustion treatment chamber by supplying a mixture gas produced by premixing a fuel gas and an oxidizing gas, and a scraper for scraping off solid matters adhering to an inner wall of the combustion treatment chamber. The mixture gas is adjusted within combustion range and supplied to the main burner during treatment for treating the exhaust gas by combusting and decomposing the exhaust gas when the scraper is not in operation, and the mixture gas is adjusted outside combustion range and supplied to the main burner during treatment for treating the exhaust gas by combusting and decomposing the exhaust gas when the scraper is in scraping operation.Type: GrantFiled: July 30, 2010Date of Patent: January 8, 2019Assignee: EBARA CORPORATIONInventors: Seiji Kashiwagi, Kotaro Kawamura
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Patent number: 10143964Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.Type: GrantFiled: May 21, 2014Date of Patent: December 4, 2018Assignee: EBARA CORPORATIONInventors: Kohtaro Kawamura, Toyoji Shinohara, Tetsuro Sugiura, Hideo Arai, Takashi Kyotani, Toshiharu Nakazawa, Keiichi Ishikawa, Seiji Kashiwagi, Yasuhiko Suzuki
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Publication number: 20180207580Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.Type: ApplicationFiled: March 20, 2018Publication date: July 26, 2018Inventors: Toshiharu NAKAZAWA, Tetsuro SUGIURA, Kohtaro KAWAMURA, Toyoji SHINOHARA, Takashi KYOTANI, Keiichi ISHIKAWA, Seiji KASHIWAGI, Yasuhiko SUZUKI, Hideo ARAI
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Patent number: 9956524Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.Type: GrantFiled: May 28, 2014Date of Patent: May 1, 2018Assignee: Ebara CorporationInventors: Toshiharu Nakazawa, Tetsuro Sugiura, Kohtaro Kawamura, Toyoji Shinohara, Takashi Kyotani, Keiichi Ishikawa, Seiji Kashiwagi, Yasuhiko Suzuki, Hideo Arai
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Publication number: 20180051878Abstract: A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.Type: ApplicationFiled: November 6, 2015Publication date: February 22, 2018Inventors: Kazutomo MIYAZAKI, Tetsuo KOMAI, Toyoji SHINOHARA, Seiji KASHIWAGI
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Patent number: 9822974Abstract: A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.Type: GrantFiled: March 26, 2014Date of Patent: November 21, 2017Assignee: EBARA CORPORATIONInventors: Kohtaro Kawamura, Toyoji Shinohara, Tetsuro Sugiura, Hideo Arai, Toshiharu Nakazawa, Keiichi Ishikawa, Seiji Kashiwagi, Yasuhiko Suzuki, Takashi Kyotani
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Patent number: 9364786Abstract: A vacuum pump has a discharge port coupled to an abatement chamber for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump is coupled to a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.Type: GrantFiled: March 26, 2014Date of Patent: June 14, 2016Assignee: Ebara CorporationInventors: Kohtaro Kawamura, Toyoji Shinohara, Tetsuro Sugiura, Hideo Arai, Takashi Kyotani, Toshiharu Nakazawa, Keiichi Ishikawa, Seiji Kashiwagi, Yasuhiko Suzuki
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Publication number: 20150367284Abstract: An exhaust gas treatment apparatus which can reduce NOx (nitrogen oxide) produced as a by-product at the time of treating an exhaust gas by applying a three-way catalytic process is disclosed. The exhaust gas treatment apparatus has an oxidative decomposition unit configured to oxidatively decompose an exhaust gas and an exhaust gas cleaning unit configured to clean the exhaust gas after oxidative decomposition. The exhaust gas treatment apparatus includes a nitrogen oxide removing unit disposed at a stage subsequent to the oxidative decomposition unit and configured to remove a nitrogen oxide contained in the exhaust gas. The nitrogen oxide removing unit is configured to supply at least one of hydrocarbon and carbon monoxide into the exhaust gas discharged from the oxidative decomposition unit to cause the at least one of hydrocarbon and carbon monoxide to react with oxygen remaining in the exhaust gas.Type: ApplicationFiled: June 16, 2015Publication date: December 24, 2015Inventors: Toyoji SHINOHARA, Takashi KYOTANI, Seiji KASHIWAGI, Kazumasa HOSOTANI
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Publication number: 20140352820Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.Type: ApplicationFiled: May 28, 2014Publication date: December 4, 2014Applicant: EBARA CORPORATIONInventors: Toshiharu NAKAZAWA, Tetsuro SUGIURA, Kohtaro KAWAMURA, Toyoji SHINOHARA, Takashi KYOTANI, Keiichi ISHIKAWA, Seiji KASHIWAGI, Yasuhiko SUZUKI, Hideo ARAI
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Publication number: 20140348717Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.Type: ApplicationFiled: May 21, 2014Publication date: November 27, 2014Applicant: EBARA CORPORATIONInventors: Kohtaro KAWAMURA, Toyoji SHINOHARA, Tetsuro SUGIURA, Hideo ARAI, Takashi KYOTANI, Toshiharu NAKAZAWA, Keiichi ISHIKAWA, Seiji KASHIWAGI, Yasuhiko SUZUKI
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Publication number: 20140295362Abstract: A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.Type: ApplicationFiled: March 26, 2014Publication date: October 2, 2014Inventors: Kohtaro KAWAMURA, Toyoji SHINOHARA, Tetsuro SUGIURA, Hideo ARAI, Toshiharu NAKAZAWA, Keiichi ISHIKAWA, Seiji KASHIWAGI, Yasuhiko SUZUKI, Takashi KYOTANI
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Publication number: 20140290919Abstract: A vacuum pump has an abatement part for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump includes a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.Type: ApplicationFiled: March 26, 2014Publication date: October 2, 2014Inventors: Kohtaro KAWAMURA, Toyoji SHINOHARA, Tetsuro SUGIURA, Hideo ARAI, Takashi KYOTANI, Toshiharu NAKAZAWA, Keiichi ISHIKAWA, Seiji KASHIWAGI, Yasuhiko SUZUKI