Abstract: A fluid heating apparatus is provided which comprises a heat-generating bent tube formed of an electrically conductive material in a tubular configuration and having opposite ends connected in communication to piping through which fluid to be heated is passed, a coil provided outside the heat-generating bent tube and wound to surround the heat-generating bent tube, and a power supply unit for feeding a high-frequency current through the coil. The fluid heating apparatus suppresses the generation of particles in the path of the fluid and may be used to heat gas or liquid in an apparatus for processing semiconductor substrates and flat panel substrates.

Abstract: A fluid heating apparatus is provided which comprises a heat-generating bent tube formed of an electrically conductive material in a tubular configuration and having opposite ends connected in communication to piping through which fluid to be heated is passed, a coil provided outside the heat-generating bent tube and wound to surround the heat-generating bent tube, and a power supply unit for feeding a high-frequency current through the coil. The fluid heating apparatus suppresses the generation of particles in the path of the fluid and may be used to heat gas or liquid in an apparatus for processing semiconductor substrates and flat panel substrates.

Abstract: This multi channel temperature controller includes several temperature sensors, an electronic multiplexer which receives output signals from these temperature sensors and which sequentially supplies these signals to its output according to the switching action of a selection signal, and an amplifier which receives the output of the electronic multiplexer. Thereby, noise such as due to thermal electro motive force generated in the contacts of prior art sets of reed relays for switching over such temperature sensor output signals can be eliminated. Further, optionally, there may be provided several input circuits, one interposed between each of these temperature sensors and the electronic multiplexer, and each including a capacitor which has electrostatic capacitance substantially greater than the electrostatic capacitance existing between its input circuit and the corresponding temperature sensor. Thereby, common mode voltage noises are eliminated or minimized.

Abstract: A reflection-type photoelectric switching apparatus comprising a lamp for projecting light rays to an object, a photoelectric element for receiving reflected light rays from the object, a reference photoelectric element mounted on a board in side-by-side relation with the photoelectric element, a light conducting means for guiding a part of said light rays from the lamp to the reference photoelectric element, and an adjusting means for adjusting the quantity of light rays guided by the light conducting means to be balanced with that of the reflected light rays received by the photoelectric element.