Patents by Inventor Seiji Okuro

Seiji Okuro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for protecting layer by forming hydrocarbon-based extremely thin film
    Patent number: 9899291
    Abstract: A method for protecting a layer includes: providing a substrate having a target layer and forming a protective layer on the target layer, said protective layer contacting and covering the target layer and containing a hydrocarbon-based layer constituting at least an upper part of the protective layer, which hydrocarbon-based layer is formed by plasma-enhanced atomic layer deposition (PEALD) using an alkylaminosilane precursor and a noble gas without a reactant.
    Type: Grant
    Filed: July 13, 2015
    Date of Patent: February 20, 2018
    Assignee: ASM IP HOLDING B.V.
    Inventors: Richika Kato, Seiji Okuro, Kunitoshi Namba, Yuya Nonaka, Akinori Nakano
  • METHOD FOR PROTECTING LAYER BY FORMING HYDROCARBON-BASED EXTREMELY THIN FILM
    Publication number: 20170018477
    Abstract: A method for protecting a layer includes: providing a substrate having a target layer and forming a protective layer on the target layer, said protective layer contacting and covering the target layer and containing a hydrocarbon-based layer constituting at least an upper part of the protective layer, which hydrocarbon-based layer is formed by plasma-enhanced atomic layer deposition (PEALD) using an alkylaminosilane precursor and a noble gas without a reactant.
    Type: Application
    Filed: July 13, 2015
    Publication date: January 19, 2017
    Inventors: Richika Kato, Seiji Okuro, Kunitoshi Namba, Yuya Nonaka, Akinori Nakano