Abstract: A spiral magnetic linear translating mechanism for use with a wafer processing system which includes a plurality of evacuatable housings connected in a series to form a processing line comprises at least one wafer support structure which is mounted to move on a track through the housings along the processing line. The structure includes a base disposed proximate a wall of the housing and includes a plurality of magnetic thread segments extending thereon to face the wall. Outside of the housing, a cylindrical shaft is mounted proximate the wall. An elongated magnetic drive with successive sections is wound spirally around the shaft to rotate with the shaft so that the sections of the drive face the wall opposite the thread segments.