Abstract: A metal capturing apparatus and an atomic layer deposition apparatus, which are capable of discharging an exhaust gas from a process chamber, in which a metal atomic layer is deposited on a substrate using a reaction gas containing a metal catalyst, without a scrubber, and easily reusing the metal catalyst contained in the exhaust gas. The metal capturing apparatus includes a capturing chamber having a capturing space, a capturing plate disposed at one side of the capturing chamber and partially inserted into the capturing chamber, a refrigerant source feeding a refrigerant cooling the capturing plate, and an attachment unit attaching the capturing plate to the capturing chamber. The atomic layer deposition apparatus includes a process chamber, a vacuum pump connected to an exhaust port of the process chamber, and a metal capturing apparatus disposed between the process chamber and the vacuum pump.

Abstract: A deposition apparatus, and a canister for the deposition apparatus capable of maintaining a predetermined amount of source material contained in a reactive gas supplied to a deposition chamber when the source material is deposited on a substrate by atomic layer deposition includes a main body, a source storage configured to store a source material, a heater disposed outside the main body, and a first feed controller configured to control the source material supplied to the main body from the source storage.

Abstract: A substrate processing apparatus that forms thin films on a plurality of substrates and thermally processes the substrates, by uniformly heating the substrates. The substrate processing apparatus includes a processing chamber, a boat in which substrates are stacked, an external heater located outside of the processing chamber, a feeder to move the boat into and out of the processing chamber, a lower heater located below the feeder, and a central heater located in the center of the boat.

Abstract: An end plate of an air breathing fuel cell stack and an air breathing fuel cell stack including the same. The air breathing fuel cell stack includes a membrane electrode assembly, including an anode electrode, a cathode electrode, and an electrolyte positioned between the anode electrode and the cathode electrode; and an end plate contacting the membrane electrode assembly. The end plate includes a first surface contacting the membrane electrode assembly, an opposing second surface; and a collector positioned at the first surface and contacting the cathode electrode.

Abstract: An atomic layer deposition apparatus includes a chamber, a vacuum pump to control a pressure in the chamber, a gas supply unit to supply a reaction gas into the chamber, a substrate holder disposed between the vacuum pump and the gas supply unit and having a heater, a mask assembly disposed between the substrate holder and the gas supply unit and having a cooling path to move coolant, and a coolant source to supply the coolant into the cooling path. The mask assembly is positioned a first distance from a substrate, and coolant is supplied into the cooling path of the mask assembly. The substrate is heated using the heater of the substrate holder, a pressure of the chamber is controlled using the vacuum pump, and reaction gasses are sequentially supplied through the gas supply unit.

Abstract: A thin film transistor (TFT) and an organic light emitting diode (OLED) display device. The TFT and the OLED display device include a substrate, a buffer layer disposed on the substrate, a semiconductor layer disposed on the buffer layer, a gate electrode insulated from the semiconductor layer, a gate insulating layer insulating the semiconductor layer from the gate electrode, and source and drain electrodes insulated from the gate electrode and partially connected to the semiconductor layer, wherein the semiconductor layer is formed from a polycrystalline silicon layer crystallized by a metal catalyst and the metal catalyst is removed by gettering using an etchant. In addition, the OLED display device includes an insulating layer disposed on the entire surface of the substrate, a first electrode disposed on the insulating layer and electrically connected to one of the source and drain electrodes, an organic layer, and a second electrode.

Abstract: A method of forming a polycrystalline silicon layer and an atomic layer deposition apparatus used for the same. The method includes forming an amorphous silicon layer on a substrate, exposing the substrate having the amorphous silicon layer to a hydrophilic or hydrophobic gas atmosphere, placing a mask having at least one open and at least one closed portion over the amorphous silicon layer, irradiating UV light toward the amorphous silicon layer and the mask using a UV lamp, depositing a crystallization-inducing metal on the amorphous silicon layer, and annealing the substrate to crystallize the amorphous silicon layer into a polycrystalline silicon layer. This method and apparatus provide for controlling the seed position and grain size in the formation of a polycrystalline silicon layer.

Abstract: A method of forming a polycrystalline silicon layer includes forming an amorphous silicon layer on a substrate by chemical vapor deposition using a gas including a silicon atom and hydrogen gas, and crystallizing the amorphous silicon layer into a polycrystalline silicon layer using a crystallization-inducing metal. The resultant polycrystalline silicon layer has an improved charge mobility.

Abstract: A planar fuel cell stack, having generators that generate electricity by an electrochemical reaction of a fuel and an oxidizing agent, the generators arranged on a same plane. A beading unit and a protruding portion are formed on a fastening plate and a separator so as to improve structural stiffness thereof. Accordingly, the constituent elements of the stack are fastened with a substantially uniform conjoining pressure compared to a conventional planar stack, and the thickness of the stack of the present invention can be thinner than that of the conventional planar stack.

Abstract: Disclosed is a fuel cartridge. The fuel cartridge according to the present disclosure comprises a fuel container having a first port configured to flow fuel therethrough; and a buffer module configured to be coupled to the fuel container, wherein the buffer module comprises a second port configured to engage with the first port, a tubing connection comprising a first and a second end, wherein the first end is coupled to or forms the second port, a third port coupled to or formed by the second end of the tubing connection, and a buffer container in fluid communication with the second and third ports via the tubing connection, wherein the buffer container is configured to store fuel therein when an inflow of the fuel to the buffer module is greater than an outflow from the buffer module.

Abstract: An in-line annealing apparatus and a method of annealing a substrate using the in-line annealing apparatus in which a plurality of heating devices provide a transportation path of a substrate and heat the substrate transported along the transportation path to a crystallization temperature, and an instantaneous high-temperature annealing unit heats the substrate positioned in the transportation path between the heating devices to a instantaneous annealing temperature. The in-line annealing apparatus and the method of annealing a substrate using the same provide a highly efficient annealing process that can be performed at various temperatures including a high temperature of 700° C. or higher.

Abstract: A flowing device for an optics-based methanol sensor includes an inner housing that surrounds the optics-based methanol sensor, an outer housing that surrounds the inner housing, a flow channel in the inner housing formed on a totally reflecting surface of the optics-based methanol sensor, a fuel inlet that is formed through the inner and outer housings and supplies liquid fuel to the flow channel, and a fuel outlet that is formed through the inner and outer housings and discharges the liquid fuel that has passed through the flow channel to an outside of the outer housing.

Abstract: An air-breathing-type polymer electrolyte membrane fuel cell and an operating method thereof capable of being stably started and operated by controlling an output current and temperature of a fuel cell stack in a predetermined range is controlled in a predetermined range so that the initial driving time of the system can be shortened through the high current operation in the low output state. The operating method of the air-breathing-type polymer electrolyte membrane fuel cell includes the steps of detecting an output current of a fuel cell stack; comparing a maximum reference value and a minimum reference value of the detected output current; and keeping the output current below the maximum reference value and above the minimum reference value.

Abstract: Disclosed is a fuel cartridge. The fuel cartridge according to the present disclosure comprises a fuel container having a first port configured to flow fuel therethrough; and a buffer module configured to be coupled to the fuel container, wherein the buffer module comprises a second port configured to engage with the first port, a tubing connection comprising a first and a second end, wherein the first end is coupled to or forms the second port, a third port coupled to or formed by the second end of the tubing connection, and a buffer container in fluid communication with the second and third ports via the tubing connection, wherein the buffer container is configured to store fuel therein when an inflow of the fuel to the buffer module is greater than an outflow from the buffer module.

Abstract: A planar fuel cell stack, having generators that generate electricity by an electrochemical reaction of a fuel and an oxidizing agent, the generators arranged on a same plane. A beading unit and a protruding portion are formed on a fastening plate and a separator so as to improve structural stiffness thereof. Accordingly, the constituent elements of the stack are fastened with a substantially uniform conjoining pressure compared to a conventional planar stack, and the thickness of the stack of the present invention can be thinner than that of the conventional planar stack.

Abstract: The present embodiments relate to a humidity controllable cathode end plate and an air breathing fuel cell stack using the same capable of preventing stack performance degradation due to the dryness of a cathode and a membrane. The air breathing fuel cell stack according the present embodiments including: a membrane electrode assembly configured of an anode, a cathode, and an electrolyte membrane positioned between the anode and the cathode; a fuel supply unit coupled to the anode to supply fuel; and a cathode end plate coupled to the cathode so that the humidity of the cathode is maintained and including a first opening part for influxing ambient air and a second opening part for outfluxing the ambient air.

Abstract: An end plate of an air breathing fuel cell stack and an air breathing fuel cell stack including the same. The air breathing fuel cell stack includes a membrane electrode assembly, including an anode electrode, a cathode electrode, and an electrolyte positioned between the anode electrode and the cathode electrode; and an end plate contacting the membrane electrode assembly. The end plate includes a first surface contacting the membrane electrode assembly, an opposing second surface; and a collector positioned at the first surface and contacting the cathode electrode.

Abstract: A cathode end plate for a breathable fuel cell stack including a first plate including a plurality of first openings and a second plate contacting one side of the first plate and including a plurality of second openings exposing two or more first openings of the plurality of first openings.

Abstract: A fuel cell stack includes a membrane electrode assembly including an anode electrode, a cathode electrode, and an electrolyte membrane positioned between the anode electrode and the cathode electrode; a separator including a channel for a flow of fuel and oxidant and closely adhered to the membrane electrode assembly; and a gasket with a two-layer structure stacked between the separator and the membrane electrode assembly.

Abstract: A flowing device for an optics-based methanol sensor includes an inner housing that surrounds the optics-based methanol sensor, an outer housing that surrounds the inner housing, a flow channel in the inner housing formed on a totally reflecting surface of the optics-based methanol sensor, a fuel inlet that is formed through the inner and outer housings and supplies liquid fuel to the flow channel, and a fuel outlet that is formed through the inner and outer housings and discharges the liquid fuel that has passed through the flow channel to an outside of the outer housing.